Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11385307 | Strongly coupled fourth-order resonance coil systems for enhanced signal detection | James S. Hyde, Jason W. Sidabras | 2022-07-12 |
| 8674694 | Coil system and method for post-exposure dosimetry using electron paramagnetic resonance spectroscopy | James S. Hyde, Jason W. Sidabras | 2014-03-18 |
| 7088101 | Aqueous sample holder for EPR and MR spectroscopy | James Stewart Hyde, Jason W. Sidabras | 2006-08-08 |
| 6828789 | Cavity resonator for electron paramagnetic resonance spectroscopy having axially uniform field | James S. Hyde, Wojciech Froncisz, James R. Anderson | 2004-12-07 |
| 6825618 | Distributed inductively-coupled plasma source and circuit for coupling induction coils to RF power supply | Bryan Pu, Hongching Shan, Claes Bjorkman, Kenny L. Doan, Mike Welch | 2004-11-30 |
| 6605177 | Substrate support with gas feed-through and method | Hamid Noorbakhsh, Robert Greenway | 2003-08-12 |
| 6568346 | Distributed inductively-coupled plasma source and circuit for coupling induction coils to RF power supply | Bryan Pu, Hongching Shan, Claes Bjorkman, Kenny L. Doan, Mike Welch | 2003-05-27 |
| 6539621 | Safety guard for an RF connector | William Taylor, Mark W. Curry | 2003-04-01 |
| 6500299 | Chamber having improved gas feed-through and method | Hamid Noorbakhsh, Robert Greenway | 2002-12-31 |
| 6304424 | Method and apparatus for minimizing plasma destabilization within a semiconductor wafer processing system | Siamak Salimian | 2001-10-16 |
| 6273022 | Distributed inductively-coupled plasma source | Bryan Pu, Hongching Shan, Claes Bjorkman, Kenny L. Doan, Mike Welch | 2001-08-14 |
| 6273736 | Safety guard for an RF connector | William Taylor, Mark W. Curry | 2001-08-14 |
| 6232236 | Apparatus and method for controlling plasma uniformity in a semiconductor wafer processing system | Hongqing Shan, Claes Bjorkman, Paul Luscher, Michael Welch | 2001-05-15 |
| 6198616 | Method and apparatus for supplying a chucking voltage to an electrostatic chuck within a semiconductor wafer processing system | Mahmoud Dahimene, Siamak Salimian | 2001-03-06 |
| 6005376 | DC power supply | Mahmoud Dahimene, Siamak Salimian | 1999-12-21 |
| 5989349 | Diagnostic pedestal assembly for a semiconductor wafer processing system | Kuang-Han Ke, Roger Alan Lindley, Hongching Shan | 1999-11-23 |
| 5952896 | Impedance matching network | Robert Greenway, Gabriel Bilek, Ajey M. Joshi | 1999-09-14 |
| 5737177 | Apparatus and method for actively controlling the DC potential of a cathode pedestal | Mahmoud Dahimene, Paul Luscher, Siamak Salimian, Mark Contreras | 1998-04-07 |