Issued Patents All Time
Showing 25 most recent of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7774670 | Method and apparatus for dynamically determining tester recipes | Douglas C. Kimbrough, Eric O. Green, Robert J. Chong | 2010-08-10 |
| 7695986 | Method and apparatus for modifying process selectivities based on process state information | Matthew A. Purdy, Matthew S. Ryskoski | 2010-04-13 |
| 7502702 | Method and apparatus for dynamic adjustment of sensor and/or metrology sensitivities | Christopher A. Bode, Kevin R. Lensing | 2009-03-10 |
| 7445945 | Method and apparatus for dynamic adjustment of a sampling plan based on wafer electrical test data | Christopher A. Bode | 2008-11-04 |
| 7402257 | Plasma state monitoring to control etching processes and across-wafer uniformity, and system for performing same | Thomas J. Sonderman | 2008-07-22 |
| 7337091 | Method and apparatus for coordinating fault detection settings and process control changes | — | 2008-02-26 |
| 7321993 | Method and apparatus for fault detection classification of multiple tools based upon external data | Elfido Coss, Jr. | 2008-01-22 |
| 7292959 | Total tool control for semiconductor manufacturing | Thomas J. Sonderman | 2007-11-06 |
| 7289867 | Automated integrated circuit device manufacturing facility using distributed control | Chandrashekar Krishnaswamy | 2007-10-30 |
| 7262864 | Method and apparatus for determining grid dimensions using scatterometry | Kevin R. Lensing, J. Broc Stirton, Marilyn I. Wright | 2007-08-28 |
| 7257458 | Automated integrated circuit device manufacturing facility using central control | — | 2007-08-14 |
| 7254453 | Secondary process controller for supplementing a primary process controller | Thomas J. Sonderman | 2007-08-07 |
| 7153709 | Method and apparatus for calibrating degradable components using process state data | Matthew A. Purdy | 2006-12-26 |
| 7100081 | Method and apparatus for fault classification based on residual vectors | Matthew A. Purdy, Robert J. Chong, Gregory A. Cherry | 2006-08-29 |
| 7031793 | Conflict resolution among multiple controllers | Naomi M. Jenkins, Jin Wang, Elfido Coss, Jr., Brian K. Cusson | 2006-04-18 |
| 6991945 | Fault detection spanning multiple processes | Howard E. Castle, Matthew A. Purdy, Gregory A. Cherry, Eric O. Green, Michael L. Miller +1 more | 2006-01-31 |
| 6988225 | Verifying a fault detection result based on a process control state | Matthew A. Purdy, Timothy L. Jackson | 2006-01-17 |
| 6960774 | Fault detection and control methodologies for ion implantation processes, and system for performing same | Elfido Coss, Jr., Patrick M. Cowan, Tom Tse | 2005-11-01 |
| 6925347 | Process control based on an estimated process result | Michael L. Miller, Thomas J. Sonderman, Alexander J. Pasadyn, Brian K. Cusson, Patrick M. Cowan +2 more | 2005-08-02 |
| 6907369 | Method and apparatus for modifying design constraints based on observed performance | Robert J. Chong, Alexander J. Pasadyn | 2005-06-14 |
| 6875622 | Method and apparatus for determining electromagnetic properties of a process layer using scatterometry measurements | — | 2005-04-05 |
| 6815235 | Methods of controlling formation of metal silicide regions, and system for performing same | — | 2004-11-09 |
| 6804014 | Method and apparatus for determining contact opening dimensions using scatterometry | Kevin R. Lensing, J. Broc Stirton, Marilyn I. Wright | 2004-10-12 |
| 6794299 | Various methods of controlling conformal film deposition processes, and a system for accomplishing same | David W. Bennett | 2004-09-21 |
| 6790683 | Methods of controlling wet chemical processes in forming metal silicide regions, and system for performing same | Terri A. Couteau | 2004-09-14 |