Issued Patents All Time
Showing 25 most recent of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10649026 | Apparatus for and method of net trace prior level subtraction | Peter Lin, Weihong Gao | 2020-05-12 |
| 9519210 | Voltage contrast characterization structures and methods for within chip process variation characterization | Yunsheng Song, Zhigang Song, Yongchun Xin | 2016-12-13 |
| 9390884 | Method of inspecting a semiconductor substrate | Eric C. Harley, Kevin T. Wu | 2016-07-12 |
| 9293382 | Voltage contrast inspection of deep trench isolation | Norbert Arnold, Jin Ping Liu, Brian W. Messenger | 2016-03-22 |
| 9291665 | Evaluating transistors with e-beam inspection | Zhigang Song | 2016-03-22 |
| 9213060 | Probe-able voltage contrast test structures | William J. Cote, Yi Feng | 2015-12-15 |
| 9207279 | Inspection tool and methodology for three dimensional voltage contrast inspection | — | 2015-12-08 |
| 9103875 | Probe-able voltage contrast test structures | William J. Cote, Yi Feng | 2015-08-11 |
| 9097760 | Probe-able voltage contrast test structures | William J. Cote, Yi Feng | 2015-08-04 |
| 8927989 | Voltage contrast inspection of deep trench isolation | Norbert Arnold, Jin Ping Liu, Brian W. Messenger | 2015-01-06 |
| 8841933 | Inspection tool and methodology for three dimensional voltage contrast inspection | — | 2014-09-23 |
| 8787074 | Static random access memory test structure | Jin Z. Wallner, Thomas A. Wallner, Shenzhi Yang | 2014-07-22 |
| 8766259 | Test structure for detection of gap in conductive layer of multilayer gate stack | Renee T. Mo, Xing Zhou | 2014-07-01 |
| 8750597 | Robust inspection alignment of semiconductor inspection tools using design information | Kevin T. Wu | 2014-06-10 |
| 8399266 | Test structure for detection of gap in conductive layer of multilayer gate stack | Renee T. Mo, Xing Zhou | 2013-03-19 |
| 8350583 | Probe-able voltage contrast test structures | William J. Cote, Yi Feng | 2013-01-08 |
| 8039837 | In-line voltage contrast detection of PFET silicide encroachment | Ishtiaq Ahsan | 2011-10-18 |
| 7927895 | Varying capacitance voltage contrast structures to determine defect resistance | Christian Lavoie, Conal E. Murray, Robert L. Wisnieff | 2011-04-19 |
| 7772866 | Structure and method of mapping signal intensity to surface voltage for integrated circuit inspection | Horatio S. Wildman, Min-Chul Sun | 2010-08-10 |
| 7732866 | Grounding front-end-of-line structures on a SOI substrate | William J. Cote | 2010-06-08 |
| 7733109 | Test structure for resistive open detection using voltage contrast inspection and related methods | Ishtiaq Ahsan, Mark B. Ketchen, Kevin McStay | 2010-06-08 |
| 7679083 | Semiconductor integrated test structures for electron beam inspection of semiconductor wafers | Min-Chul Sun, Scott Jansen, Randy W. Mann | 2010-03-16 |
| 7547560 | Defect identification system and method for repairing killer defects in semiconductor devices | David M. Shuttleworth, Bradley Albers, Werner Weck, Gregory Brown | 2009-06-16 |
| 7518190 | Grounding front-end-of-line structures on a SOI substrate | William J. Cote | 2009-04-14 |
| 7474107 | Buried short location determination using voltage contrast inspection | Horatio S. Wildman | 2009-01-06 |