| 9293382 |
Voltage contrast inspection of deep trench isolation |
Norbert Arnold, Jin Ping Liu, Oliver D. Patterson |
2016-03-22 |
| 8927989 |
Voltage contrast inspection of deep trench isolation |
Norbert Arnold, Jin Ping Liu, Oliver D. Patterson |
2015-01-06 |
| 8836003 |
Lateral epitaxial grown SOI in deep trench structures and methods of manufacture |
Joseph Ervin, Karen A. Nummy, Ravi M. Todi |
2014-09-16 |
| 8723243 |
Polysilicon/metal contact resistance in deep trench |
Paul C. Parries, Chengwen Pei, Geng Wang, Yanli Zhang |
2014-05-13 |
| 8692307 |
Lateral epitaxial grown SOI in deep trench structures and methods of manufacture |
Joseph Ervin, Karen A. Nummy, Ravi M. Todi |
2014-04-08 |
| 8642423 |
Polysilicon/metal contact resistance in deep trench |
Paul C. Parries, Chengwen Pei, Geng Wang, Yanli Zhang |
2014-02-04 |
| 8445362 |
Apparatus and method for programming an electronically programmable semiconductor fuse |
Dan Moy, Stephen Wu, Peter Wang, Edwin Soler, Gabriel Chiulli |
2013-05-21 |
| 8232163 |
Lateral epitaxial grown SOI in deep trench structures and methods of manufacture |
Joseph Ervin, Karen A. Nummy, Ravi M. Todi |
2012-07-31 |
| 8106485 |
Chemical oxide removal of plasma damaged SiCOH low k dielectrics |
William G. America, Steven H. Johnston |
2012-01-31 |
| 7757200 |
Structure of an apparatus for programming an electronically programmable semiconductor fuse |
Dan Moy, Stephen Wu, Peter Wang, Edwin Soler, Gabriel Chiulli |
2010-07-13 |
| 7446005 |
Manufacturable recessed strained RSD structure and process for advanced CMOS |
Renee T. Mo, Dominic J. Schepis |
2008-11-04 |
| 7368393 |
Chemical oxide removal of plasma damaged SiCOH low k dielectrics |
William G. America, Steven H. Johnston |
2008-05-06 |
| 7153738 |
Method for making a trench memory cell |
Kangguo Cheng |
2006-12-26 |
| 7115955 |
Semiconductor device having a strained raised source/drain |
Renee T. Mo, Dominic J. Schepis |
2006-10-03 |
| 6995094 |
Method for deep trench etching through a buried insulator layer |
Herbert L. Ho, Mahender Kumar, Michael D. Steigerwalt |
2006-02-07 |
| 6706586 |
Method of trench sidewall enhancement |
Christophe N. Collins, Rajarao Jammy, Siddhartha Panda |
2004-03-16 |
