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Water cooled, air bearing based rotating anode x-ray illumination source |
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2024-04-09 |
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Actuator assembly including magnetic sensor system for vibrationless position feedback |
Patrick Shih Chang, Matthew Rosa, Jonathan K. Wells, Pedro Reynoso-Mora |
2019-10-22 |
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Rotary probe head |
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2018-10-23 |
| 9778579 |
System and method for controlling a temperature of a reaction assembly |
Chetan Mahadeswaraswamy, Michael Binnard |
2017-10-03 |
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Apparatus, optical assembly, method for inspection or measurement of an object and method for manufacturing a structure |
Eric Peter Goodwin, David M. Williamson, Daniel Gene Smith, Alexander Cooper, Alec Paul Robertson +1 more |
2017-04-18 |
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Direct drive modular belt conveyor, cartridge, and quick connect-disconnect constant velocity drive shaft, for high speed FOUP transport |
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2013-02-19 |
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Combination load lock for handling workpieces |
Klaus Becker, Klaus Petry, Marvin R. LaFontaine, Michael R. Mitrano |
2010-11-09 |
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Workpiece handling scan arm for ion implantation system |
Ari Eiriksson, Donovan Beckel, Robert J. Mitchell, Marvin R. LaFontaine, Ashwin M. Purohit +4 more |
2009-07-14 |
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High-performance electrostatic clamp comprising a resistive layer, micro-grooves, and dielectric layer |
Peter L. Kellerman, Victor M. Benveniste, Dale K. Stone |
2006-12-19 |
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Magnetic support structure for an elevator tube of a vertical rapid thermal processing unit |
Dennis Normandin, Ari Eiriksson |
2006-09-05 |
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Uniform gas cushion wafer support |
Ari Eiriksson, Richard Gueler |
2006-07-04 |
| 7026581 |
Apparatus for positioning an elevator tube |
Thomas L. Durant, Ari Eiriksson, Richard Gueler |
2006-04-11 |
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Wafer pedestal tilt mechanism |
Allan D. Weed |
2004-04-27 |
| 5959305 |
Method and apparatus for monitoring charge neutralization operation |
Michael E. Mack, Paul Lustiber, David J. Fish |
1999-09-28 |