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Method and system for process control with flexible sampling |
Onur N. Demirer, Roie Volkovich, William Pierson, Dana Klein |
2020-08-25 |
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Metrology using overlay and yield critical patterns |
Daniel Kandel, Mark D. Smith, Eran Amit, Myungjun Lee |
2020-06-16 |
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Knowledge management tool interface |
Sandra J. Stevens, Belinda A. Lellock, Anthony Jason Ma'luf, Kurt E. Grashaw |
2020-05-05 |
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Virtual inspection systems for process window characterization |
Laurent Karsenti, Kris Bhaskar, Brian Duffy, Vijayakumar Ramachandran |
2019-09-03 |
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System to administer insurance knowledge management tool |
Sandra J. Stevens, Belinda A. Lellock, Anthony Jason Ma'luf, Kurt E. Grashaw |
2019-02-26 |
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Feed forward of metrology data in a metrology system |
Ady Levy, Daniel Kandel, Michael Adel, Leonid Poslavsky, John Robinson +9 more |
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Dual use cryptographic system and method |
Joshua Breitbach, Adriane R. Van Auken, Jerome L. Schmidt, Kevin M. Bayer |
2017-10-31 |
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Qualifying patterns for microlithography |
Rui-fang Shi |
2017-04-04 |
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Method and system for universal target based inspection and metrology |
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Method for measuring positions of structures on a mask and thereby determining mask manufacturing errors |
Frank Laske, Mohammad Mehdi Daneshpanah, Slawomir Czerkas |
2016-08-23 |
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System for electronic administration of employee skill certification badge program |
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Method and system for evaluating a variation in a parameter of a pattern |
Michael Ben Yishai, Avishai Bartov, Gadi Greenberg, Lior Shoval, Ophir Gvirtzer |
2012-04-17 |
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Method for obtaining PPS accuracy using an unclassified GPS receiver measurement interface |
Steven A. Harshbarger, Jean J. Pollari |
2000-01-25 |