Issued Patents All Time
Showing 1–25 of 46 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12325909 | EM source for enhanced plasma control | Alexander Jansen, Keith A. Miller, Prashanth Kothnur, David Gunther, Emily Schooley | 2025-06-10 |
| 12203163 | Methods for shaping magnetic fields during semiconductor processing | Goichi Yoshidome, Suhas Bangalore Umesh, Sushil Arun Samant, Wei Lei, Kishor Kalathiparambil +4 more | 2025-01-21 |
| 12094699 | Methods and apparatus for controlling ion fraction in physical vapor deposition processes | Xiaodong Wang, Joung Joo Lee, Fuhong Zhang, Keith A. Miller, William Fruchterman +4 more | 2024-09-17 |
| D1038901 | Collimator for a physical vapor deposition chamber | Fuhong Zhang, Suhas Bangalore Umesh, Madan Kumar Shimoga Mylarappa | 2024-08-13 |
| 11990319 | Methods and apparatus for processing a substrate | Yida LIN, Rui Li, Haitao Wang, Noufal Kappachali, Xiangjin Xie | 2024-05-21 |
| D1026839 | Collimator for a physical vapor deposition (PVD) chamber | Luke Vianney Varkey, Xiangjin Xie | 2024-05-14 |
| D1026054 | Collimator for a physical vapor deposition (PVD) chamber | Keith A. Miller, Luke Vianney Varkey, Xiangjin Xie, Kishor Kalathiparambil | 2024-05-07 |
| D1025935 | Collimator for a physical vapor deposition (PVD) chamber | Luke Vianney Varkey, Xiangjin Xie | 2024-05-07 |
| D1025936 | Collimator for a physical vapor deposition (PVD) chamber | Luke Vianney Varkey, Xiangjin Xie | 2024-05-07 |
| D1024149 | Collimator for a physical vapor deposition (PVD) chamber | Luke Vianney Varkey, Xiangjin Xie | 2024-04-23 |
| 11915915 | Apparatus for generating magnetic fields during semiconductor processing | Suhas Bangalore Umesh | 2024-02-27 |
| D1009816 | Collimator for a physical vapor deposition chamber | Keith A. Miller, Fuhong Zhang, Luke Vianney Varkey, Kishor Kalathiparambil, Xiangjin Xie | 2024-01-02 |
| 11810770 | Methods and apparatus for controlling ion fraction in physical vapor deposition processes | Xiaodong Wang, Joung Joo Lee, Fuhong Zhang, Keith A. Miller, William Fruchterman +4 more | 2023-11-07 |
| D998575 | Collimator for use in a physical vapor deposition (PVD) chamber | Fuhong Zhang, Lanlan Zhong, Kishor Kalathiparambil | 2023-09-12 |
| D997111 | Collimator for use in a physical vapor deposition (PVD) chamber | Fuhong Zhang, Lanlan Zhong, Kishor Kalathiparambil | 2023-08-29 |
| 11692262 | EM source for enhanced plasma control | Alexander Jansen, Keith A. Miller, Prashanth Kothnur, David Gunther, Emily Schooley | 2023-07-04 |
| D970566 | Sputter target for a physical vapor deposition chamber | William Fruchterman, Ilya Lavitsky, Srinivasa Rao YEDLA, Kirankumar Neelasandra SAVANDAIAH | 2022-11-22 |
| 11492697 | Apparatus for improved anode-cathode ratio for rf chambers | Kirankumar Neelasandra SAVANDAIAH, Keith A. Miller, Srinivasa Rao YEDLA, Chandrashekar Kenchappa | 2022-11-08 |
| 11492699 | Substrate temperature non-uniformity reduction over target life using spacing compensation | Suhas Bangalore Umesh, Preetham Rao, Shirish A. PETHE, Fuhong Zhang, Kishor Kalathiparambil +1 more | 2022-11-08 |
| 11335577 | Methods and apparatus to prevent interference between processing chambers | Fuhong Zhang, Sunil Kumar Garg, Paul Kiely, William Fruchterman, Zheng Wang +1 more | 2022-05-17 |
| 11315771 | Methods and apparatus for processing a substrate | Xiangjin Xie, Fuhong Zhang, Shirish A. PETHE, Lewis Yuan Tse Lo, Lanlan Zhong +2 more | 2022-04-26 |
| 11309169 | Biasable flux optimizer / collimator for PVD sputter chamber | Fuhong Zhang, Anthony Infante, Zheng Wang | 2022-04-19 |
| D946638 | Target profile for a physical vapor deposition chamber target | Fuhong Zhang, Zheng Wang | 2022-03-22 |
| D937329 | Sputter target for a physical vapor deposition chamber | William Fruchterman, Ilya Lavitsky, Srinivasa Rao YEDLA, Kirankumar Neelasandra SAVANDAIAH | 2021-11-30 |
| 11037768 | Methods and apparatus for controlling ion fraction in physical vapor deposition processes | Xiaodong Wang, Joung Joo Lee, Fuhong Zhang, Keith A. Miller, William Fruchterman +4 more | 2021-06-15 |