Issued Patents All Time
Showing 1–25 of 95 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12337250 | Robot device | Hidenori Ishibashi, Tomoo Mizukami, Takuma Araki, Tomoyuki Arai, Goushi Koike +7 more | 2025-06-24 |
| 11969662 | Robot device | Hidenori Ishibashi, Tomoo Mizukami, Takuma Araki, Tomoyuki Arai, Goushi Koike +7 more | 2024-04-30 |
| 10361067 | Drawing apparatus, and method of manufacturing article by controlling a plurality of charged particle optical systems based on respective sets of sub-drawing regions | Go Tsuchiya | 2019-07-23 |
| 9690201 | Drawing method and method of manufacturing article | Kouichirou Tsujita | 2017-06-27 |
| 9583311 | Drawing apparatus, lithography system, pattern data creation method, drawing method, and method of manufacturing articles | Yoshihiro Hirata | 2017-02-28 |
| 9558916 | Lithography system and method of manufacturing articles | Yoshihiro Hirata | 2017-01-31 |
| 9455124 | Drawing apparatus, and method of manufacturing article | Yoshihiro Hirata | 2016-09-27 |
| 9293292 | Drawing apparatus, and method of manufacturing article | Yoshihiro Hirata | 2016-03-22 |
| 9245715 | Drawing apparatus, and method of manufacturing article | Tomoyuki Morita | 2016-01-26 |
| 9171698 | Drawing apparatus, and method of manufacturing article | Tomoyuki Morita | 2015-10-27 |
| 9040935 | Blanking apparatus, drawing apparatus, and method of manufacturing article | Tomoyuki Morita | 2015-05-26 |
| 9001387 | Drawing apparatus, data processing method, and method of manufacturing article that transform partially overlapping regions using different transformation rules | Satoru Oishi, Hiromi Kinebuchi | 2015-04-07 |
| 8759797 | Drawing apparatus, drawing method, and method of manufacturing article | Tomoyuki Morita | 2014-06-24 |
| 8716672 | Charged particle optical system, drawing apparatus, and method of manufacturing article | Kentaro Sano, Akira Miyake, Yoshikiyo Yui | 2014-05-06 |
| 8692218 | Charged particle beam exposure apparatus | Haruo Yoda | 2014-04-08 |
| 8610082 | Drawing apparatus and method of manufacturing article | Kentaro Sano | 2013-12-17 |
| 8083562 | Method of manufacturing image display apparatus using sputtering | Hiromasa Mitani | 2011-12-27 |
| 8075361 | Electron source manufacturing method | — | 2011-12-13 |
| 8008622 | Electron beam apparatus and method of generating an electron beam irradiation pattern | Ryo Fujita, Haruo Yoda, Kimiaki Ando, Yuji Inoue | 2011-08-30 |
| 7692166 | Charged particle beam exposure apparatus | Haruo Yoda | 2010-04-06 |
| 7635851 | Electron beam apparatus and method of generating an electron beam irradiation pattern | Ryo Fujita, Haruo Yoda, Kimiaki Ando, Yuji Inoue | 2009-12-22 |
| 7378671 | Aberration measuring apparatus for charged particle beam optical system, charged particle beam lithography machine having the aberration measuring apparatus, and device fabrication method using the apparatus | Hiroya Ohta | 2008-05-27 |
| 7341393 | Mechanism for sealing | Masaki Hosoda, Yasuhiro Someda, Mahito Negishi, Koichi Wakizaka, Masakazu Sugaya | 2008-03-11 |
| 7276707 | Deflector, method of manufacturing deflector, and charged particle beam exposure apparatus | Yuichi Iwasaki, Kenji Tamamori, Kouji Asano, Masayoshi Esashi, Yoshinori Nakayama +2 more | 2007-10-02 |
| 7230252 | Aberration adjusting method, device fabrication method, and charged particle beam lithography machine | Hiroya Ohta | 2007-06-12 |