Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10361067 | Drawing apparatus, and method of manufacturing article by controlling a plurality of charged particle optical systems based on respective sets of sub-drawing regions | Masato Muraki | 2019-07-23 |
| 8993985 | Drawing apparatus and method of manufacturing article | Kentaro Sano | 2015-03-31 |
| 7612868 | Exposure apparatus and method of manufacturing device | — | 2009-11-03 |