Issued Patents All Time
Showing 25 most recent of 41 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11545330 | Ion source with multiple bias electrodes | Wilhelm Platow, Paul Silverstein, Neil J. Bassom, David Sporleder | 2023-01-03 |
| 11244800 | Stepped indirectly heated cathode with improved shielding | Wilhelm Platow, Neil J. Bassom, Shu Satoh, Paul Silverstein | 2022-02-08 |
| 10403503 | Wafer cooling system and method | Mike Ameen, Causon Ko-Chuan Jen | 2019-09-03 |
| 9978599 | Wafer cooling apparatus and method | Mike Ameen, Causon Ko-Chuan Jen | 2018-05-22 |
| 9842752 | Optical heat source with restricted wavelengths for process heating | David Bernhardt, W. Davis Lee, William F. DiVergilio | 2017-12-12 |
| 9558914 | Bipolar wafer charge monitor system and ion implantation system comprising same | Takao Sakase, Joseph Foley | 2017-01-31 |
| 9218941 | Ion implantation system and method with variable energy control | Causon Ko-Chuan Jen | 2015-12-22 |
| 8227768 | Low-inertia multi-axis multi-directional mechanically scanned ion implantation system | Theodore H. Smick, Geoffrey Ryding, Ronald Horner, Paul Eide, Kan Ota | 2012-07-24 |
| 8168941 | Ion beam angle calibration and emittance measurement system for ribbon beams | Donald N. Polner, Geoffrey Ryding, Theodore H. Smick, Takao Sakase, Ronald Horner +5 more | 2012-05-01 |
| 8124946 | Post-decel magnetic energy filter for ion implantation systems | Geoffrey Ryding, Theodore H. Smick, Takao Sakase, Bo H. Vanderberg | 2012-02-28 |
| 7872247 | Ion beam guide tube | Geoffrey Ryding, Gregory Robert Alcott, Lee Spraggon, Robert J. Mitchell, Martin A. Hilkene +1 more | 2011-01-18 |
| 7611975 | Method of implanting a substrate and an ion implanter for performing the method | Adrian Murrell, Peter Michael Banks, Matthew Peter Dobson, Peter Kindersley, Takao Sakase +2 more | 2009-11-03 |
| 7582883 | Method of scanning a substrate in an ion implanter | Geoffrey Ryding, Takao Sakase, Theodore H. Smick | 2009-09-01 |
| 7479644 | Ion beam diagnostics | Geoffrey Ryding, Takao Sakase, Theodore H. Smick | 2009-01-20 |
| 7282427 | Method of implanting a substrate and an ion implanter for performing the method | Adrian Murrell, Bernard Harrison, Peter Edwards, Peter Kindersley, Craig Lowrie +4 more | 2007-10-16 |
| 7253424 | Method of implanting a substrate and an ion implanter for performing the method | Adrian Murrell, Bernard Harrison, Peter Edwards, Peter Kindersley, Craig Lowrie +4 more | 2007-08-07 |
| 7235797 | Method of implanting a substrate and an ion implanter for performing the method | Adrian Murrell, Bernard Harrison, Peter Edwards, Peter Kindersley, Takao Sakase +2 more | 2007-06-26 |
| 7049210 | Method of implanting a substrate and an ion implanter for performing the method | Adrian Murrell, Bernard Harrison, Peter Edwards, Peter Kindersley, Craig Lowrie +4 more | 2006-05-23 |
| 6989315 | SIMOX using controlled water vapor for oxygen implants | Robert P. Dolan, Bernhard F. Cordts, III, Geoffrey Ryding | 2006-01-24 |
| 6956223 | Multi-directional scanning of movable member and ion beam monitoring arrangement therefor | Theodore H. Smick, Frank D. Roberts, II, Geoffrey Ryding, Takao Sakase, Adrian Murrell +2 more | 2005-10-18 |
| 6908836 | Method of implanting a substrate and an ion implanter for performing the method | Adrian Murrell, Bernard Harrison, Peter Edwards, Peter Kindersley, Takao Sakase +2 more | 2005-06-21 |
| 6878946 | Indirectly heated button cathode for an ion source | Takao Sakase, Shu Satoh, Geoffrey Ryding, Peter Rose, Christos Christou | 2005-04-12 |
| 6870170 | Ion implant dose control | Takao Sakase | 2005-03-22 |
| 6555832 | Determining beam alignment in ion implantation using Rutherford Back Scattering | Geoffrey Ryding, Theodore H. Smick, John Ruffell, Peter Rose | 2003-04-29 |
| 6515288 | Vacuum bearing structure and a method of supporting a movable member | Geoffrey Ryding, Theodore H. Smick, Takao Sakase | 2003-02-04 |