Issued Patents All Time
Showing 1–25 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7732225 | Method for measuring contamination in liquids at PPQ levels | Jeffrey Hanson, Monte A. Douglas | 2010-06-08 |
| 6592676 | Chemical solution and method for reducing the metal contamination on the surface of a semiconductor substrate | Paul Mertens, Guy Vereecke | 2003-07-15 |
| 6180491 | Isolation structure and method | Keith A. Joyner | 2001-01-30 |
| 6114741 | Trench isolation of a CMOS structure | Keith A. Joyner | 2000-09-05 |
| 6110838 | Isotropic polysilicon plus nitride stripping | — | 2000-08-29 |
| 5741396 | Isotropic nitride stripping | — | 1998-04-21 |
| 5437765 | Semiconductor processing | — | 1995-08-01 |
| 5268067 | Wafer clamping method | William W. Dostalik | 1993-12-07 |
| 5262610 | Low particulate reliability enhanced remote microwave plasma discharge device | Steve S. Huang, Cecil J. Davis, Rhett B. Jucha | 1993-11-16 |
| 5248636 | Processing method using both a remotely generated plasma and an in-situ plasma with UV irradiation | Cecil J. Davis, Rhett B. Jucha, Joseph D. Luttmer, Rudy L. York, Robert T. Matthews +1 more | 1993-09-28 |
| 5138973 | Wafer processing apparatus having independently controllable energy sources | Cecil J. Davis, Rhett B. Jucha, Joseph D. Luttmer, Rudy L. York, Robert T. Matthews +1 more | 1992-08-18 |
| 5101764 | Method and apparatus for integrating optical sensor into processor | Thomas E. Tang, Ming-Jang Hwang, Steve S. Huang, Rachelle J. Bienstock | 1992-04-07 |
| 5102231 | Semiconductor wafer temperature measurement system and method | John David Lawrence, Wayne G. Fisher, Cecil J. Davis | 1992-04-07 |
| 5002632 | Method and apparatus for etching semiconductor materials | Douglas A. Webb | 1991-03-26 |
| 4988644 | Method for etching semiconductor materials using a remote plasma generator | Rhett B. Jucha, Cecil J. Davis, Steve S. Huang, Jeff D. Achenbach | 1991-01-29 |
| 4916091 | Plasma and plasma UV deposition of SiO.sub.2 | Dean W. Freeman, James B. Burris, Cecil J. Davis | 1990-04-10 |
| 4906328 | Method for wafer treating | Dean W. Freeman, James B. Burris, Cecil J. Davis | 1990-03-06 |
| 4904621 | Remote plasma generation process using a two-stage showerhead | Cecil J. Davis | 1990-02-27 |
| 4886570 | Processing apparatus and method | Cecil J. Davis, Robert T. Matthews, Rhett B. Jucha, Randall C. Hildenbrand, John I. Jones | 1989-12-12 |
| 4882008 | Dry development of photoresist | Cesar M. Garza, Monte A. Douglas, Cecil J. Davis | 1989-11-21 |
| 4878994 | Method for etching titanium nitride local interconnects | Rhett B. Jucha, Cecil J. Davis, Tom Tang | 1989-11-07 |
| 4875989 | Wafer processing apparatus | Cecil J. Davis, Robert T. Matthews, Joe V. Abernathy, Timothy A. Wooldridge | 1989-10-24 |
| 4872938 | Processing apparatus | Cecil J. Davis, Joseph V. Abernathy, Robert T. Matthews, Randall C. Hildenbrand, Bruce Simpson +2 more | 1989-10-10 |
| 4867841 | Method for etch of polysilicon film | Cecil J. Davis, Rhett B. Jucha | 1989-09-19 |
| 4857140 | Method for etching silicon nitride | — | 1989-08-15 |