Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12339592 | Method for thermo-mechanical control of a heat sensitive element and device for use in a lithographic production process | Victor Sebastiaan Dolk, Mauritius Gerardus Elisabeth Schneiders | 2025-06-24 |
| 12276918 | Method and apparatus for calculating a spatial map associated with a component | Mauritius Gerardus Elisabeth Schneiders, Wenjie JIN | 2025-04-15 |
| 12235592 | Object holder, electrostatic sheet and method for making an electrostatic sheet | Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Marcus Adrianus Van De Kerkhof, Roger Franciscus Mattheus Maria Hamelinck, Shahab Shervin, Marinus Augustinus Christiaan Verschuren +7 more | 2025-02-25 |
| 12197139 | Object holder, tool and method of manufacturing an object holder | Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Johannes Bernardus Charles ENGELEN, Arnoud Willem Notenboom, Jim Vincent Overkamp, Kjeld Gertrudus Hendrikus Janssen +3 more | 2025-01-14 |
| 10955595 | Multilayer reflector, method of manufacturing a multilayer reflector and lithographic apparatus | Adrianus Hendrik Koevoets | 2021-03-23 |
| 10747127 | Lithographic apparatus | Frits Van Der Meulen, Erik Johan Arlemark, Hendrikus Herman Marie Cox, Martinus Agnes Willem Cuijpers, Joost DE HOOGH +17 more | 2020-08-18 |
| 10712673 | Method of determining a property of a structure, inspection apparatus and device manufacturing method | Sietse Thijmen Van Der Post | 2020-07-14 |
| 10488765 | Method of optimizing the position and/or size of a measurement illumination spot relative to a target on a substrate, and associated apparatus | Johan Maria Van Boxmeer, Marinus Johannes Maria Van Dam, Sietse Thijmen Van Der Post, Johannes Hubertus Antonius Van De Rijdt | 2019-11-26 |
| 10185224 | Method and apparatus for inspection and metrology | Ferry Zijp, Duygu Akbulut, Peter Danny Van Voorst, Jeroen Johan Maarten Van De Wijdeven | 2019-01-22 |
| 9927722 | Method and apparatus for inspection and metrology | Duygu Akbulut, Jeroen Johan Maarten Van De Wijdeven, Ferry Zijp | 2018-03-27 |
| 9811001 | Method and apparatus for inspection and metrology | Peter Danny Van Voorst, Duygu Akbulut, Jeroen Johan Maarten Van De Wijdeven, Ferry Zijp | 2017-11-07 |