Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11041253 | Silicon wafers by epitaxial deposition | Visweswaren Sivaramakrishnan, Tirunelveli S. Ravi, Andrzej Kaszuba, Quoc Truong | 2021-06-22 |
| 9982363 | Silicon wafers by epitaxial deposition | Visweswaren Sivaramakrishnan, Tirunelveli S. Ravi, Andrzej Kaszuba, Quoc Truong | 2018-05-29 |
| 9255346 | Silicon wafers by epitaxial deposition | Visweswaren Sivaramakrishnan, Tirunelveli S. Ravi, Andrzej Kaszuba, Quoc Truong | 2016-02-09 |
| 9058988 | Methods for depositing layers having reduced interfacial contamination | Jinsong Tang, Yihwan Kim, Satheesh Kuppurao, Errol Antonio C. Sanchez | 2015-06-16 |
| 8951351 | Wafer processing hardware for epitaxial deposition with reduced backside deposition and defects | Kailash Kiran Patalay, Craig Metzner | 2015-02-10 |
| 8747560 | System and method for pedestal adjustment | Richard O. Collins, Kailash Kiran Patalay, Zhepeng CONG | 2014-06-10 |
| 8512472 | Method and apparatus to enhance process gas temperature in a CVD reactor | Kailash Kiran Patalay | 2013-08-20 |
| 8441640 | Non-contact substrate support position sensing system and corresponding adjustments | Kailash Kiran Patalay, Richard O. Collins, Zhepeng CONG | 2013-05-14 |
| 8418982 | Self supporting table base | — | 2013-04-16 |
| 8398777 | System and method for pedestal adjustment | Richard O. Collins, Kailash Kiran Patalay, Zhepeng CONG | 2013-03-19 |
| 7964038 | Apparatus for improved azimuthal thermal uniformity of a substrate | Kailash Kiran Patalay, Dean Berlin | 2011-06-21 |
| 7651948 | Pre-cleaning of substrates in epitaxy chambers | Yihwan Kim, Lori D. Washington, Arkadii V. Samoilov, Ali Zojaji | 2010-01-26 |
| 6876442 | Method of calibrating and using a semiconductor processing system | David K. Carlson, Arkadii V. Samoilov, Lance A. Scudder, Paul B. Comita, Annie Karpati | 2005-04-05 |
| 4742026 | Method for the selective dry etching of layers of III-V group semiconductive materials | Jean-Baptiste Chevrier | 1988-05-03 |