Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12303307 | Semiconductor device measurement method using x-ray scattering and semiconductor device manufacturing method including the measurement method | Jaeyong Lee, Minjung Shin, Seungryeol Oh, Chuhee LEE, Byunghyun HWANG | 2025-05-20 |
| 10605722 | Metrology system calibration refinement | John Lesoine, Malik Sadiq, Lanhua Wei, Shankar Krishnan, Leonid Poslavsky +1 more | 2020-03-31 |
| 10088413 | Spectral matching based calibration | Zhiming Jiang, Ward Dixon, Kenneth Edward James, Jr., Leonid Poslavsky, Torsten R. Kaack | 2018-10-02 |
| 9857291 | Metrology system calibration refinement | John Lesoine, Malik Sadiq, Lanhua Wei, Shankar Krishnan, Leonid Poslavsky +1 more | 2018-01-02 |
| 9574992 | Single wavelength ellipsometry with improved spot size capability | Esen Salcin, Fuming Wang, Kevin Peterlinz, Damon F. Kvamme, Uri Greenberg +1 more | 2017-02-21 |
| 9110020 | Atmospheric molecular contamination control with local purging | Ward Dixon, Torsten R. Kaack, Ning Wang, Jagjit Sandhu | 2015-08-18 |
| 9046474 | Multi-analyzer angle spectroscopic ellipsometry | Ward Dixon, Leonid Poslavsky, Torsten R. Kaack | 2015-06-02 |
| 8830486 | Atmospheric molecular contamination control with local purging | Ward Dixon, Torsten R. Kaack, Ning Wang, Jagjit Sandhu | 2014-09-09 |
| 7869040 | Measurement systems configured to perform measurements of a specimen and illumination subsystems configured to provide illumination for a measurement system | Shankar Krishnan, Shing Lee, Haixing Zou | 2011-01-11 |
| 7755764 | Purge gas flow control for high-precision film measurements using ellipsometry and reflectometry | Shankar Krishnan | 2010-07-13 |
| 7408641 | Measurement systems configured to perform measurements of a specimen and illumination subsystems configured to provide illumination for a measurement system | Shankar Krishnan, Shing Lee, Haixing Zou | 2008-08-05 |
| 7369233 | Optical system for measuring samples using short wavelength radiation | Mehrdad Nikoonahad, Shing Lee, Sergio Edelstein, Guoheng Zhao, Gary Janik | 2008-05-06 |
| 7295325 | Time-resolved measurement technique using radiation pulses | Gary Janik, Mehrdad Nikoonahad | 2007-11-13 |
| 7190441 | Methods and systems for preparing a sample for thin film analysis | James T. McWhirter, Liang Wang, Haixing Zou, Dan G. Georgesco, Bernard Lautee +3 more | 2007-03-13 |
| 6999180 | Optical film topography and thickness measurement | Gary Janik, Ying Gao, Johannes D. de Veer | 2006-02-14 |