Issued Patents All Time
Showing 1–25 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12257611 | Cleaning jig, coating apparatus, and cleaning method | Satoshi Shimmura, Koji Takayanagi, Kenta SHIBASAKI | 2025-03-25 |
| 11868057 | Solution treatment apparatus and cleaning method | Kenta SHIBASAKI, Satoshi Shimmura, Koji Takayanagi, Kenji Yada, Shinichi Seki +1 more | 2024-01-09 |
| 11862485 | Nozzle standby device, liquid processing apparatus and operation method of liquid processing apparatus | Satoshi Shimmura, Kohei Kawakami, Koji Takayanagi | 2024-01-02 |
| 11273464 | Substrate processing apparatus | Satoshi Shimmura, Yuji Sakai, Kenta SHIBASAKI, Koji Takayanagi, Kenji Yada +2 more | 2022-03-15 |
| 10755952 | Chemical liquid discharge mechanism, liquid processing apparatus, chemical liquid discharge method, and storage medium | Norihiko Sasagawa, Masahito Hamada | 2020-08-25 |
| 10643872 | Liquid processing apparatus, liquid processing method, and storage medium | Masahiro Abe, Tohru Azuma, Tsunenaga Nakashima, Naofumi Kishita, Hideki Kajiwara | 2020-05-05 |
| 10168618 | Liquid processing method and storage medium | Norihiko Sasagawa, Yasushi Takiguchi | 2019-01-01 |
| 10074548 | Chemical liquid discharge mechanism, liquid processing apparatus, chemical liquid discharge method, and storage medium | Norihiko Sasagawa, Masahito Hamada | 2018-09-11 |
| 9195138 | Liquid processing apparatus, liquid processing method and storage medium | Norihiko Sasagawa, Yasushi Takiguchi | 2015-11-24 |
| 8808798 | Coating method | Takahiro Kitano, Koichi Obata, Nobuhiro Ogata | 2014-08-19 |
| 8758855 | Coating film forming apparatus, use of coating film forming apparatus, and recording medium | Nobuhiro Ogata, Taro Yamamoto, Akihiro Fujimoto | 2014-06-24 |
| 8551563 | Coating method | Takahiro Kitano, Koichi Obata, Nobuhiro Ogata | 2013-10-08 |
| 8287954 | Apparatus and method of forming an applied film | Kousuke Yoshihara | 2012-10-16 |
| 8256370 | Coating apparatus and method | Takahiro Kitano, Koichi Obata, Nobuhiro Ogata | 2012-09-04 |
| 8225737 | Coating apparatus and method | Takahiro Kitano, Koichi Obata, Nobuhiro Ogata | 2012-07-24 |
| 8186298 | Coating film forming apparatus, use of coating film forming apparatus, and recording medium | Nobuhiro Ogata, Taro Yamamoto, Akihiro Fujimoto | 2012-05-29 |
| 7802536 | Apparatus and method of forming an applied film | Kousuke Yoshihara | 2010-09-28 |
| 7344600 | Substrate treatment apparatus | Naofumi Kishita | 2008-03-18 |
| 6982102 | Coating unit and coating method | Shinichi Hayashi | 2006-01-03 |
| 6919913 | Processing system | Issei Ueda | 2005-07-19 |
| 6752872 | Coating unit and coating method | Shinichi Hayashi | 2004-06-22 |
| 6730599 | Film forming method and film forming apparatus | Shuichi Nagamine | 2004-05-04 |
| 6616762 | Treatment solution supply apparatus and treatment solution supply method | Hirofumi Ookuma | 2003-09-09 |
| 6541376 | Film forming method and film forming apparatus | Shuichi Nagamine | 2003-04-01 |
| 6419408 | Developing process and developing unit | — | 2002-07-16 |