Issued Patents All Time
Showing 1–25 of 93 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10975468 | Method of cleaning plasma processing apparatus | Hiroki Kishi, Mitsuru Hashimoto, Keiichi Shimoda, Akitaka Shimizu | 2021-04-13 |
| 10923329 | Substrate processing apparatus and substrate processing method | Akitaka Shimizu, Fumiko Yamashita, Daisuke Urayama | 2021-02-16 |
| 10626498 | Method of processing target object to be processed | Shigeru Tahara | 2020-04-21 |
| 10236162 | Method of etching porous film | Shigeru Tahara, Mikhail Baklanov, Liping Zhang, Jean-Francois de Marneffe | 2019-03-19 |
| 10217933 | Method for etching multilayer film | Mitsunori Ohata | 2019-02-26 |
| 10074800 | Method for etching magnetic layer including isopropyl alcohol and carbon dioxide | Shigeru Tahara | 2018-09-11 |
| 10053773 | Method of cleaning plasma processing apparatus | Hiroki Kishi, Mitsuru Hashimoto, Keiichi Shimoda, Akitaka Shimizu | 2018-08-21 |
| 9882124 | Etching method and substrate processing apparatus | Akitaka Shimizu, Fumiko Yamashita | 2018-01-30 |
| 9859102 | Method of etching porous film | Shigeru Tahara, Mikhail Baklanov, Liping Zhang, Jean-Francois de Marneffe | 2018-01-02 |
| 9803286 | Method for etching copper layer | Keiichi Shimoda, Kei Nakayama | 2017-10-31 |
| 9793130 | Method for processing object to be processed | Jun Sato | 2017-10-17 |
| 9691643 | Etching apparatus | Tadashi Kotsugi, Fumiko Yamashita | 2017-06-27 |
| 9660182 | Plasma processing method and plasma processing apparatus | Takashi Sone, Daisuke Urayama, Masato Kushibiki, Nao Koizumi, Wataru Kume +1 more | 2017-05-23 |
| 9647206 | Method for etching layer to be etched | Mitsuru Hashimoto, Takashi Sone, Keiichi Shimoda | 2017-05-09 |
| 9419211 | Etching method and substrate processing apparatus | Masato Kushibiki, Nao Koizumi, Takashi Sone, Fumiko Yamashita | 2016-08-16 |
| 9412618 | Pattern forming method | Shinya Morikita, Fumiko Yamashita | 2016-08-09 |
| 9340158 | Outer mirror | Toru Shimura | 2016-05-17 |
| 9245764 | Semiconductor device manufacturing method | Tadashi Kotsugi, Fumiko Yamashita, Kenji Adachi | 2016-01-26 |
| 9234083 | Method and apparatus for forming a periodic pattern using a self-assembled block copolymer | Fumiko Yamashita, Satoko Niitsuma | 2016-01-12 |
| 9208997 | Method of etching copper layer and mask | Masato Kushibiki, Takashi Sone, Akitaka Shimizu, Fumiko Yamashita | 2015-12-08 |
| 9177781 | Plasma processing method and manufacturing method of semiconductor device | Shigeru Tahara, Fumiko Yamashita, Hiroshi Tomita, Tokuhisa Ohiwa, Hisashi Okuchi +1 more | 2015-11-03 |
| 9177816 | Deposit removal method | Shigeru Tahara, Takanori Matsumoto | 2015-11-03 |
| 9165784 | Substrate processing method and storage medium | Masato Kushibiki, Fumiko Yamashita | 2015-10-20 |
| 9150969 | Method of etching metal layer | Fumiko Yamashita, Koyumi SASA | 2015-10-06 |
| 9126229 | Deposit removal method | Shigeru Tahara, Hiroshi Tomita, Tokuhisa Ohiwa, Hisashi Okuchi, Mitsuhiro Omura | 2015-09-08 |