Issued Patents All Time
Showing 1–25 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10236162 | Method of etching porous film | Shigeru Tahara, Eiichi Nishimura, Liping Zhang, Jean-Francois de Marneffe | 2019-03-19 |
| 9941151 | Method for producing an integrated circuit including a metallization layer comprising low K dielectric material | Liping Zhang | 2018-04-10 |
| 9859102 | Method of etching porous film | Shigeru Tahara, Eiichi Nishimura, Liping Zhang, Jean-Francois de Marneffe | 2018-01-02 |
| 9595422 | Plasma etching of porous substrates | Liping Zhang, Jean-Francois de Marneffe | 2017-03-14 |
| 9492841 | Method for pore sealing of porous materials using polyimide langmuir-blodgett film | Victor Luchinin, Svetlana Goloudina, Vyacheslav Pasyuta, Alexey Ivanov, Mikhail Krishtab | 2016-11-15 |
| 9414445 | Method and apparatus for microwave treatment of dielectric films | Iftikhar Ahmad, Liping Zhang | 2016-08-09 |
| 9117666 | Method for activating a porous layer surface | Quoc Toan Le, Yiting Sun, Silvia Armini | 2015-08-25 |
| 8974870 | Fabrication of porogen residues free low-k materials with improved mechanical and chemical resistance | Quoc Toan Le, Laurent Souriau, Patrick Verdonck | 2015-03-10 |
| 8968864 | Sealed porous materials, methods for making them, and semiconductor devices comprising them | Frederik Goethals, Pascal Van Der Voort, Isabel Van Driessche | 2015-03-03 |
| 8961803 | Protection of porous substrates before treatment | — | 2015-02-24 |
| 8540890 | Protective treatment for porous materials | Francesca Iacopi, Serge Vanhaelemeersch | 2013-09-24 |
| 8158523 | Quantification of hydrophobic and hydrophilic properties of materials | Adam Michal Urbanowicz | 2012-04-17 |
| 7964039 | Cleaning of plasma chamber walls using noble gas cleaning step | Adam Michal Urbanowicz, Denis Shamiryan, Stefan De Gendt | 2011-06-21 |
| 7458251 | Method for determining solvent permeability of films | Philippe Foubert | 2008-12-02 |
| 7415902 | Method for the quantification of hydrophilic properties of porous materials | Konstantin Mogilnikov, Quoc Toan Le | 2008-08-26 |
| 7042091 | Fluorinated hard mask for micropatterning of polymers | Serge Vanhaelemeersch, Karen Maex, Joost Waeterloos, Gilbert Declerck | 2006-05-09 |
| 6900140 | Anisotropic etching of organic-containing insulating layers | Serge Vanhaelemeersch | 2005-05-31 |
| 6844267 | Anisotropic etching of organic-containing insulating layers | Serge Vanhaelemeersch | 2005-01-18 |
| 6662631 | Method and apparatus for characterization of porous films | Konstantin Mogilnikov, Karen Maex, Denis Shamiryan, Fedor Nikolaevich Dultsev | 2003-12-16 |
| 6635964 | Metallization structure on a fluorine-containing dielectric and a method for fabrication thereof | Karen Maex, Serge Vanhaelemeersch | 2003-10-21 |
| 6593251 | Method to produce a porous oxygen-silicon layer | Denis Shamiryan, Karen Maex, Serge Vanhaelemeersch | 2003-07-15 |
| 6435008 | Apparatus and method for determining porosity | Fedor Nikolaevich Dultsev, Konstantin Mogilnikov, Karen Maex | 2002-08-20 |
| 6323555 | Metallization structure on a fluorine-containing dielectric and a method for fabrication thereof | Karen Maex, Serge Vanhaelemeersch | 2001-11-27 |
| 6319736 | Apparatus and method for determining porosity | Fedor Nikolaevich Dultsev, Konstantin Mogilnikov, Karen Maex | 2001-11-20 |
| 6255227 | Etching process of CoSi2 layers | Ricardo A. Donaton, Karen Maex, Rita Verbeeck, Philippe Jansen, Rita Rooyackers +1 more | 2001-07-03 |