Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9091667 | Detection of particle contamination on wafers | Carsten Hartig, Daniel Fischer | 2015-07-28 |
| 8158523 | Quantification of hydrophobic and hydrophilic properties of materials | Mikhail Baklanov | 2012-04-17 |
| 7964039 | Cleaning of plasma chamber walls using noble gas cleaning step | Mikhail Baklanov, Denis Shamiryan, Stefan De Gendt | 2011-06-21 |