Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7964039 | Cleaning of plasma chamber walls using noble gas cleaning step | Adam Michal Urbanowicz, Mikhail Baklanov, Stefan De Gendt | 2011-06-21 |
| 7799664 | Method for selective epitaxial growth of source/drain areas | Peter Verheyen, Rita Rooyackers | 2010-09-21 |
| 7598184 | Plasma composition for selective high-k etch | Vasile Paraschiv, Marc Demand | 2009-10-06 |
| 7521369 | Selective removal of rare earth based high-k materials in a semiconductor device | Marc Demand, Vasile Paraschiv | 2009-04-21 |
| 7390708 | Patterning of doped poly-silicon gates | Marc Demand, Vasile Paraschiv | 2008-06-24 |
| 6662631 | Method and apparatus for characterization of porous films | Mikhail Baklanov, Konstantin Mogilnikov, Karen Maex, Fedor Nikolaevich Dultsev | 2003-12-16 |
| 6593251 | Method to produce a porous oxygen-silicon layer | Mikhail Baklanov, Karen Maex, Serge Vanhaelemeersch | 2003-07-15 |