Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8540890 | Protective treatment for porous materials | Mikhail Baklanov, Francesca Iacopi | 2013-09-24 |
| 7807583 | High aspect ratio via etch | Joke Van Aelst, Herbert Struyf | 2010-10-05 |
| 7611986 | Dual damascene patterning method | Jan Van Olmen, Marleen Van Hove, Herbert Struyf, Dirk Hendrickx, Werner Boullart | 2009-11-03 |
| 7566634 | Method for chip singulation | Eric Beyne, Bart Swinnen | 2009-07-28 |
| 7557027 | Method of producing microcystalline silicon germanium suitable for micromachining | Ann Witvrouw, Maria Gromova, Marc Schaekers, Brenda Eyckens | 2009-07-07 |
| 7338896 | Formation of deep via airgaps for three dimensional wafer to wafer interconnect | Eddy Kunnen, Laure Elisa Carbonell | 2008-03-04 |
| 7042091 | Fluorinated hard mask for micropatterning of polymers | Mikhail Baklanov, Karen Maex, Joost Waeterloos, Gilbert Declerck | 2006-05-09 |
| 6900140 | Anisotropic etching of organic-containing insulating layers | Mikhail Baklanov | 2005-05-31 |
| 6844266 | Anisotropic etching of organic-containing insulating layers | Karen Maex, Ricardo A. Donaton, Michael Baklanov, Herbert Struyf, Marc Schaekers | 2005-01-18 |
| 6844267 | Anisotropic etching of organic-containing insulating layers | Mikhail Baklanov | 2005-01-18 |
| 6821884 | Method of fabricating a semiconductor device | Karen Maex | 2004-11-23 |
| 6806501 | Integrated circuit having SiC layer | Herman Meynen, Philip D. Dembowski | 2004-10-19 |
| 6635964 | Metallization structure on a fluorine-containing dielectric and a method for fabrication thereof | Karen Maex, Mikhail Baklanov | 2003-10-21 |
| 6607950 | MIS transistors with a metal gate and high-k dielectric and method of forming | Kirklen Henson, Rita Rooyackers, Goncal Badenes | 2003-08-19 |
| 6599814 | Method for removal of sic | Herman Meynen, Philip D. Dembowski | 2003-07-29 |
| 6593251 | Method to produce a porous oxygen-silicon layer | Mikhail Baklanov, Denis Shamiryan, Karen Maex | 2003-07-15 |
| 6380039 | Method for forming a FET having L-shaped insulating spacers | Goncal Badenes, Ludo Deferm, Stephan Beckx | 2002-04-30 |
| 6352936 | Method for stripping ion implanted photoresist layer | Christian Jehoul, Kristel Van Baekel, Werner Boullart, Herbert Struyf | 2002-03-05 |
| 6323555 | Metallization structure on a fluorine-containing dielectric and a method for fabrication thereof | Karen Maex, Mikhail Baklanov | 2001-11-27 |
| 6245489 | Fluorinated hard mask for micropatterning of polymers | Mikhail Baklanov, Karen Maex, Joost Waeterloos, Gilbert Declerck | 2001-06-12 |
| 6096657 | Method for forming a spacer | Stephan Beckx, Stefaan Decoutere | 2000-08-01 |