Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7807583 | High aspect ratio via etch | Joke Van Aelst, Serge Vanhaelemeersch | 2010-10-05 |
| 7611986 | Dual damascene patterning method | Jan Van Olmen, Marleen Van Hove, Dirk Hendrickx, Serge Vanhaelemeersch, Werner Boullart | 2009-11-03 |
| 6844266 | Anisotropic etching of organic-containing insulating layers | Karen Maex, Ricardo A. Donaton, Michael Baklanov, Serge Vanhaelemeersch, Marc Schaekers | 2005-01-18 |
| 6352936 | Method for stripping ion implanted photoresist layer | Christian Jehoul, Kristel Van Baekel, Werner Boullart, Serge Vanhaelemeersch | 2002-03-05 |