Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7042091 | Fluorinated hard mask for micropatterning of polymers | Mikhail Baklanov, Serge Vanhaelemeersch, Karen Maex, Joost Waeterloos | 2006-05-09 |
| 6245489 | Fluorinated hard mask for micropatterning of polymers | Mikhail Baklanov, Serge Vanhaelemeersch, Karen Maex, Joost Waeterloos | 2001-06-12 |
| 4658281 | Radiation-sensitive semiconductor device | Johannes M. Sevenhans | 1987-04-14 |