Issued Patents All Time
Showing 26–27 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6245489 | Fluorinated hard mask for micropatterning of polymers | Serge Vanhaelemeersch, Karen Maex, Joost Waeterloos, Gilbert Declerck | 2001-06-12 |
| 6153484 | Etching process of CoSi.sub.2 layers | Ricardo A. Donaton, Karen Maex, Rita Verbeeck, Philippe Jansen, Rita Rooyackers +1 more | 2000-11-28 |