Issued Patents All Time
Showing 26–50 of 93 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8993352 | Plasma processing method and plasma processing apparatus | Tadashi Kotsugi, Takashi Sone | 2015-03-31 |
| 8961737 | Plasma processing apparatus | — | 2015-02-24 |
| 8961805 | Dry etching method for metal film | Takashi Sone | 2015-02-24 |
| 8962489 | Method for etching film containing cobalt and palladium | Masato Kushibiki | 2015-02-24 |
| 8877081 | Etching method and etching apparatus | Tadashi Kotsugi, Fumiko Yamashita | 2014-11-04 |
| 8815495 | Pattern forming method and manufacturing method of semiconductor device | Masato Kushibiki | 2014-08-26 |
| 8778206 | Substrate processing method and storage medium | Takashi Sone, Fumiko Yamashita | 2014-07-15 |
| 8772172 | Semiconductor device manufacturing method and plasma etching apparatus | Masato Kushibiki | 2014-07-08 |
| 8741396 | Method for forming amorphous carbon nitride film, amorphous carbon nitride film, multilayer resist film, method for manufacturing semiconductor device, and storage medium in which control program is stored | Hiraku Ishikawa | 2014-06-03 |
| 8715520 | Substrate processing method and storage medium | Takashi Sone | 2014-05-06 |
| 8679985 | Dry etching method for silicon nitride film | Yusuke Shimizu | 2014-03-25 |
| 8642136 | Substrate processing method and substrate processing apparatus for performing a deposition process and calculating a termination time of the deposition process | Masato Kushibiki, Akitaka Shimizu | 2014-02-04 |
| 8608974 | Substrate processing method | — | 2013-12-17 |
| 8585831 | Substrate cleaning method | Hidefumi Matsui, Tsuyoshi Moriya, Shinichi Kawaguchi, Jun Yamawaku, Kunio Miyauchi | 2013-11-19 |
| 8551289 | Plasma processing apparatus | Shimao Yoneyama | 2013-10-08 |
| 8530354 | Substrate processing method | Masato Kushibiki | 2013-09-10 |
| 8518828 | Semiconductor device fabrication method | Tetsuo Endoh | 2013-08-27 |
| 8491804 | Substrate processing method | Masato Kushibiki | 2013-07-23 |
| 8491805 | Semiconductor device manufacturing method and plasma etching apparatus | Masato Kushibiki | 2013-07-23 |
| 8383517 | Substrate processing method and substrate processing apparatus | Chie Kato, Akitaka Shimizu, Hiroyuki Takahashi | 2013-02-26 |
| 8383521 | Substrate processing method | Masato Kushibiki, Fumiko Yamashita | 2013-02-26 |
| 8377721 | Substrate processing system and method | Tsuyoshi Shibata | 2013-02-19 |
| 8357615 | Method of manufacturing semiconductor device | Yuki Chiba, Ryuichi Asako | 2013-01-22 |
| 8353986 | Substrate processing apparatus | Yoshiaki Sasaski, Yusuke Muraki, Yuko Ono | 2013-01-15 |
| 8329050 | Substrate processing method | Takashi Sone | 2012-12-11 |