Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8551289 | Plasma processing apparatus | Eiichi Nishimura | 2013-10-08 |
| 6858112 | Process depending on plasma discharges sustained by inductive coupling | Daniel Flamm, Georgy K. Vinogradov | 2005-02-22 |
| 5965034 | High frequency plasma process wherein the plasma is executed by an inductive structure in which the phase and anti-phase portion of the capacitive currents between the inductive structure and the plasma are balanced | Georgy K. Vinogradov | 1999-10-12 |