Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9137884 | Apparatus and method for plasma processing | Vladimir M. Menagarishvili | 2015-09-15 |
| 8247977 | Induction coil, a plasma generator and a plasma generating method | Vladimir M. Menagarishvili, Tetsuhiko Shimamura, Masayuki Nakamura | 2012-08-21 |
| 6858112 | Process depending on plasma discharges sustained by inductive coupling | Daniel Flamm, Shimao Yoneyama | 2005-02-22 |
| 5965034 | High frequency plasma process wherein the plasma is executed by an inductive structure in which the phase and anti-phase portion of the capacitive currents between the inductive structure and the plasma are balanced | Shimao Yoneyama | 1999-10-12 |