TS

Tetsuhiko Shimamura

Lam Research: 1 patents #1,364 of 2,128Top 65%
Overall (All Time): #3,219,588 of 4,157,543Top 80%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
8247977 Induction coil, a plasma generator and a plasma generating method Georgy K. Vinogradov, Vladimir M. Menagarishvili, Masayuki Nakamura 2012-08-21