| 12400828 |
Temperature control for insertable target holder for solid dopant materials |
Shreyansh Patel, Graham Wright, Daniel Alvarado, Brian S. Gori, William R. Bogiages, Jr. +2 more |
2025-08-26 |
| D1051838 |
Single-slot tubular cathode |
Bon-Woong Koo, Frank Sinclair, Alexandre Likhanskii, Svetlana B. Radovanov, Alexander S. Perel +6 more |
2024-11-19 |
| 11664192 |
Temperature control for insertable target holder for solid dopant materials |
Shreyansh Patel, Graham Wright, Daniel Alvarado, Brian S. Gori, William R. Bogiages, Jr. +2 more |
2023-05-30 |
| 11631567 |
Ion source with single-slot tubular cathode |
Bon-Woong Koo, Frank Sinclair, Alexandre Likhanskii, Svetlana B. Radovanov, Alexander S. Perel +6 more |
2023-04-18 |
| 11569063 |
Apparatus, system and method for energy spread ion beam |
Paul J. Murphy, Frank Sinclair, Jun Lu, Anthony Renau |
2023-01-31 |
| 11482397 |
High output ion source, ion implanter, and method of operation |
Craig R. Chaney, Frank Sinclair |
2022-10-25 |
| 11404254 |
Insertable target holder for solid dopant materials |
Shreyansh Patel, Graham Wright, Daniel Alvarado, Klaus Becker, Stephen E. Krause |
2022-08-02 |
| 11170973 |
Temperature control for insertable target holder for solid dopant materials |
Shreyansh Patel, Graham Wright, Daniel Alvarado, Brian S. Gori, William R. Bogiages, Jr. +2 more |
2021-11-09 |
| 11127557 |
Ion source with single-slot tubular cathode |
Bon-Woong Koo, Frank Sinclair, Alexandre Likhanskii, Svetlana B. Radovanov, Alexander S. Perel +6 more |
2021-09-21 |
| 10957509 |
Insertable target holder for improved stability and performance for solid dopant materials |
Graham Wright, Daniel Alvarado, Shreyansh Patel |
2021-03-23 |
| 10896799 |
Ion source with multiple configurations |
Klaus Becker, Carlos M. Goulart, Daniel Alvarado, Alexander S. Perel |
2021-01-19 |
| 10692697 |
Apparatus and techniques for decelerated ion beam with no energy contamination |
Frank Sinclair, Klaus Becker |
2020-06-23 |
| 10431421 |
Apparatus and techniques for beam mapping in ion beam system |
Eric D. Wilson, George M. Gammel, Sruthi Chennadi, Shane Conley |
2019-10-01 |
| 10290461 |
Ion source for enhanced ionization |
Klaus Becker, Daniel Alvarado, Alexander S. Perel |
2019-05-14 |
| 10147584 |
Apparatus and techniques for decelerated ion beam with no energy contamination |
Frank Sinclair, Klaus Becker |
2018-12-04 |
| 9905396 |
Curved post scan electrode |
Frank Sinclair, Edward W. Bell, Robert C. Lindberg |
2018-02-27 |
| 9691584 |
Ion source for enhanced ionization |
Klaus Becker, Daniel Alvarado |
2017-06-27 |
| 8803110 |
Methods for beam current modulation by ion source parameter modulation |
Michael Graf, Edward C. Eisner, William F. DiVergilio |
2014-08-12 |
| 8524584 |
Carbon implantation process and carbon ion precursor composition |
William Davis Lee, Tseh-Jen Hsieh |
2013-09-03 |
| 8350236 |
Aromatic molecular carbon implantation processes |
W. Davis Lee |
2013-01-08 |
| 8193513 |
Hybrid ion source/multimode ion source |
William F. DiVergilio, Michael Graf |
2012-06-05 |
| 8089052 |
Ion source with adjustable aperture |
William F. DiVergilio, Edward C. Eisner, Michael Graf |
2012-01-03 |
| 7759657 |
Methods for implanting B22Hx and its ionized lower mass byproducts |
Patrick Splinter |
2010-07-20 |
| 7589333 |
Methods for rapidly switching off an ion beam |
Michael Graf, Edward C. Eisner, William F. DiVergilio |
2009-09-15 |
| 7531819 |
Fluorine based cleaning of an ion source |
William F. DiVergilio, William P. Reynolds, Christopher W. Hodgdon, Sean Joyce |
2009-05-12 |
