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Method and system for controlling radical distribution |
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2011-10-18 |
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Method and system for controlling radical distribution |
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2010-05-18 |
| 7585614 |
Sub-lithographic imaging techniques and processes |
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| 7502660 |
Feature dimension deviation correction system, method and program product |
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2009-03-10 |
| 7289864 |
Feature dimension deviation correction system, method and program product |
Wesley C. Natzle, Merritt Funk, Kevin Lally, Daniel Prager |
2007-10-30 |
| 7027125 |
System and apparatus for photolithography |
Mark C. Hakey, Charles W. Koburger, III, Peter H. Mitchell |
2006-04-11 |
| 6387596 |
Method of forming resist images by periodic pattern removal |
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Alignment methodology for lithography |
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2002-01-29 |
| 6338921 |
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Micro adjustable illumination aperture |
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2001-07-31 |
| 6014422 |
Method for varying x-ray hybrid resist space dimensions |
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Process for the vapor deposition of polysilanes photoresists |
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1992-12-22 |
