Issued Patents All Time
Showing 25 most recent of 44 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11978820 | Thin single-crystal silicon solar cells mounted to a structural support member and method of fabricating | David V. Horak, Mark C. Hakey, William R. Tonti, James M. Leas | 2024-05-07 |
| 10589445 | Method of cleaving a single crystal substrate parallel to its active planar surface and method of using the cleaved daughter substrate | Toshiharu Furukawa, Mark C. Hakey, David V. Horak, William P. Parker, William R. Tonti | 2020-03-17 |
| 7989222 | Method of making integrated circuit chip utilizing oriented carbon nanotube conductive layers | Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III | 2011-08-02 |
| 7889317 | Immersion lithography with equalized pressure on at least projection optics component and wafer | Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak | 2011-02-15 |
| 7851064 | Methods and structures for promoting stable synthesis of carbon nanotubes | Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III +1 more | 2010-12-14 |
| 7829883 | Vertical carbon nanotube field effect transistors and arrays | Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III +1 more | 2010-11-09 |
| 7820502 | Methods of fabricating vertical carbon nanotube field effect transistors for arrangement in arrays and field effect transistors and arrays formed thereby | Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III +1 more | 2010-10-26 |
| 7786583 | Integrated circuit chip utilizing oriented carbon nanotube conductive layers | Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III | 2010-08-31 |
| 7691720 | Vertical nanotube semiconductor device structures and methods of forming the same | Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III +1 more | 2010-04-06 |
| 7674674 | Method of forming a dual gated FinFET gain cell | Toshiharu Furukawa, Mark C. Hakey, David V. Horak, Charles W. Koburger, III, Mark E. Masters | 2010-03-09 |
| 7585614 | Sub-lithographic imaging techniques and processes | Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III +2 more | 2009-09-08 |
| 7566613 | Method of forming a dual gated FinFET gain cell | Toshiharu Furukawa, Mark C. Hakey, David V. Horak, Charles W. Koburger, III, Mark E. Masters | 2009-07-28 |
| 7560347 | Methods for forming a wrap-around gate field effect transistor | Toshiharu Furukawa, Mark C. Hakey, David V. Horak, Charles W. Koburger, III | 2009-07-14 |
| 7535016 | Vertical carbon nanotube transistor integration | Toshiharu Furukawa, Mark C. Hakey, David V. Horak, Charles W. Koburger, III, Mark E. Masters | 2009-05-19 |
| 7525156 | Shallow trench isolation fill by liquid phase deposition of SiO2 | Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III, Larry Nesbit | 2009-04-28 |
| 7473633 | Method for making integrated circuit chip having carbon nanotube composite interconnection vias | Toshiharu Furukawa, Mark C. Hakey, David V. Horak, Charles W. Koburger, III, Mark E. Masters +1 more | 2009-01-06 |
| 7439081 | Method for making integrated circuit chip utilizing oriented carbon nanotube conductive layers | Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles Koburger III | 2008-10-21 |
| 7435653 | Methods for forming a wrap-around gate field effect transistor | Toshiharu Furukawa, Mark C. Hakey, David V. Horak, Charles W. Koburger, III | 2008-10-14 |
| 7385673 | Immersion lithography with equalized pressure on at least projection optics component and wafer | Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak | 2008-06-10 |
| 7374793 | Methods and structures for promoting stable synthesis of carbon nanotubes | Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David Vaclav Hotak, Charles W. Koburger, III +1 more | 2008-05-20 |
| 7329567 | Vertical field effect transistors incorporating semiconducting nanotubes grown in a spacer-defined passage | Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak, Larry Nesbit | 2008-02-12 |
| 7273794 | Shallow trench isolation fill by liquid phase deposition of SiO2 | Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III, Larry Nesbit | 2007-09-25 |
| 7271878 | Wafer cell for immersion lithography | Toshiharu Furukawa, Mark C. Hakey, David Vaclav Horal, Charles W. Koburger, III | 2007-09-18 |
| 7271444 | Wrap-around gate field effect transistor | Toshiharu Furukawa, Mark C. Hakey, David V. Horak, Charles W. Koburger, III | 2007-09-18 |
| 7264415 | Methods of forming alternating phase shift masks having improved phase-shift tolerance | Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III +1 more | 2007-09-04 |