Issued Patents All Time
Showing 25 most recent of 41 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7994575 | Metal-oxide-semiconductor device structures with tailored dopant depth profiles | Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III | 2011-08-09 |
| 7951660 | Methods for fabricating a metal-oxide-semiconductor device structure | Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III | 2011-05-31 |
| 7932549 | Carbon nanotube conductor for trench capacitors | Steven J. Holmes, Toshiharu Furukawa, Mark C. Hakey, David V. Horak, Charles W. Koburger, III | 2011-04-26 |
| 7851064 | Methods and structures for promoting stable synthesis of carbon nanotubes | Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III +1 more | 2010-12-14 |
| 7829883 | Vertical carbon nanotube field effect transistors and arrays | Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III +1 more | 2010-11-09 |
| 7820502 | Methods of fabricating vertical carbon nanotube field effect transistors for arrangement in arrays and field effect transistors and arrays formed thereby | Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III +1 more | 2010-10-26 |
| 7691720 | Vertical nanotube semiconductor device structures and methods of forming the same | Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III +1 more | 2010-04-06 |
| 7585614 | Sub-lithographic imaging techniques and processes | Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III +2 more | 2009-09-08 |
| 7525156 | Shallow trench isolation fill by liquid phase deposition of SiO2 | Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III, Peter H. Mitchell | 2009-04-28 |
| 7504314 | Method for fabricating oxygen-implanted silicon on insulation type semiconductor and semiconductor formed therefrom | Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III | 2009-03-17 |
| 7393779 | Shrinking contact apertures through LPD oxide | Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III | 2008-07-01 |
| 7374793 | Methods and structures for promoting stable synthesis of carbon nanotubes | Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David Vaclav Hotak, Charles W. Koburger, III +1 more | 2008-05-20 |
| 7329567 | Vertical field effect transistors incorporating semiconducting nanotubes grown in a spacer-defined passage | Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak, Peter H. Mitchell | 2008-02-12 |
| 7273794 | Shallow trench isolation fill by liquid phase deposition of SiO2 | Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III, Peter H. Mitchell | 2007-09-25 |
| 7264415 | Methods of forming alternating phase shift masks having improved phase-shift tolerance | Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III +1 more | 2007-09-04 |
| 7256114 | Process for oxide cap formation in semiconductor manufacturing | Steven J. Holmes, Toshiharu Furukawa, Mark C. Hakey, David V. Horak, Charles W. Koburger, III | 2007-08-14 |
| 7250347 | Double-gate FETs (Field Effect Transistors) | Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III +1 more | 2007-07-31 |
| 7244980 | Line mask defined active areas for 8F2 DRAM cells with folded bit lines and deep trench patterns | Rolf Weis, Ramachandra Divakaruni | 2007-07-17 |
| 7211844 | Vertical field effect transistors incorporating semiconducting nanotubes grown in a spacer-defined passage | Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak, Peter H. Mitchell | 2007-05-01 |
| 7038299 | Selective synthesis of semiconducting carbon nanotubes | Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III +1 more | 2006-05-02 |
| 6998204 | Alternating phase mask built by additive film deposition | Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III +1 more | 2006-02-14 |
| 6989308 | Method of forming FinFET gates without long etches | Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David Vaclav Hofak, Charles W. Koburger, III +1 more | 2006-01-24 |
| 6890828 | Method for supporting a bond pad in a multilevel interconnect structure and support structure formed thereby | David V. Horak, Charles W. Koburger, III, Peter H. Mitchell | 2005-05-10 |
| 6875685 | Method of forming gas dielectric with support structure | Toshiharu Furukawa, Mark C. Hakey, David V. Horak, Charles W. Koburger, III, Peter H. Mitchell +1 more | 2005-04-05 |
| 6790739 | Structure and methods for process integration in vertical DRAM cell fabrication | Rajeev Malik, Jochen Beintner, Rama Divakaruni | 2004-09-14 |