| 7994575 |
Metal-oxide-semiconductor device structures with tailored dopant depth profiles |
Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III |
2011-08-09 |
$2,733,000 |
| 7951660 |
Methods for fabricating a metal-oxide-semiconductor device structure |
Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III |
2011-05-31 |
$4,283,000 |
| 7932549 |
Carbon nanotube conductor for trench capacitors |
Steven J. Holmes, Toshiharu Furukawa, Mark C. Hakey, David V. Horak, Charles W. Koburger, III |
2011-04-26 |
$6,102,000 |
| 7851064 |
Methods and structures for promoting stable synthesis of carbon nanotubes |
Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III +1 more |
2010-12-14 |
$5,212,000 |
| 7829883 |
Vertical carbon nanotube field effect transistors and arrays |
Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III +1 more |
2010-11-09 |
$6,046,000 |
| 7820502 |
Methods of fabricating vertical carbon nanotube field effect transistors for arrangement in arrays and field effect transistors and arrays formed thereby |
Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III +1 more |
2010-10-26 |
$4,266,000 |
| 7691720 |
Vertical nanotube semiconductor device structures and methods of forming the same |
Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III +1 more |
2010-04-06 |
$5,890,000 |
| 7585614 |
Sub-lithographic imaging techniques and processes |
Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III +2 more |
2009-09-08 |
$16,659,000 |
| 7525156 |
Shallow trench isolation fill by liquid phase deposition of SiO2 |
Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III, Peter H. Mitchell |
2009-04-28 |
$8,592,000 |
| 7504314 |
Method for fabricating oxygen-implanted silicon on insulation type semiconductor and semiconductor formed therefrom |
Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III |
2009-03-17 |
$4,806,000 |
| 7393779 |
Shrinking contact apertures through LPD oxide |
Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III |
2008-07-01 |
$7,630,000 |
| 7374793 |
Methods and structures for promoting stable synthesis of carbon nanotubes |
Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David Vaclav Hotak, Charles W. Koburger, III +1 more |
2008-05-20 |
$8,483,000 |
| 7329567 |
Vertical field effect transistors incorporating semiconducting nanotubes grown in a spacer-defined passage |
Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak, Peter H. Mitchell |
2008-02-12 |
$10,496,000 |
| 7273794 |
Shallow trench isolation fill by liquid phase deposition of SiO2 |
Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III, Peter H. Mitchell |
2007-09-25 |
$7,894,000 |
| 7264415 |
Methods of forming alternating phase shift masks having improved phase-shift tolerance |
Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III +1 more |
2007-09-04 |
$5,939,000 |
| 7256114 |
Process for oxide cap formation in semiconductor manufacturing |
Steven J. Holmes, Toshiharu Furukawa, Mark C. Hakey, David V. Horak, Charles W. Koburger, III |
2007-08-14 |
$10,148,000 |
| 7250347 |
Double-gate FETs (Field Effect Transistors) |
Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III +1 more |
2007-07-31 |
$9,877,000 |
| 7244980 |
Line mask defined active areas for 8F2 DRAM cells with folded bit lines and deep trench patterns |
Rolf Weis, Ramachandra Divakaruni |
2007-07-17 |
|
| 7211844 |
Vertical field effect transistors incorporating semiconducting nanotubes grown in a spacer-defined passage |
Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak, Peter H. Mitchell |
2007-05-01 |
$7,088,000 |
| 7038299 |
Selective synthesis of semiconducting carbon nanotubes |
Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III +1 more |
2006-05-02 |
$4,743,000 |
| 6998204 |
Alternating phase mask built by additive film deposition |
Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak, Charles W. Koburger, III +1 more |
2006-02-14 |
$5,958,000 |
| 6989308 |
Method of forming FinFET gates without long etches |
Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David Vaclav Hofak, Charles W. Koburger, III +1 more |
2006-01-24 |
$7,705,000 |
| 6890828 |
Method for supporting a bond pad in a multilevel interconnect structure and support structure formed thereby |
David V. Horak, Charles W. Koburger, III, Peter H. Mitchell |
2005-05-10 |
$5,425,000 |
| 6875685 |
Method of forming gas dielectric with support structure |
Toshiharu Furukawa, Mark C. Hakey, David V. Horak, Charles W. Koburger, III, Peter H. Mitchell +1 more |
2005-04-05 |
$5,479,000 |
| 6790739 |
Structure and methods for process integration in vertical DRAM cell fabrication |
Rajeev Malik, Jochen Beintner, Rama Divakaruni |
2004-09-14 |
$5,712,000 |
