| 7250334 |
Metal insulator metal (MIM) capacitor fabrication with sidewall spacers and aluminum cap (ALCAP) top electrode |
Byron Lovell Williams, Alwin Tsao, Hisashi Shichijo, Satyavolu S. Papa Rao, Kenneth D. Brennan +1 more |
2007-07-31 |
| 7189615 |
Single mask MIM capacitor and resistor with in trench copper drift barrier |
Satyavolu Srinivas Papa Rao, Stephan Grunow, Kenneth D. Brennan, Somit Joshi, Montray Leavy +3 more |
2007-03-13 |
| 7115467 |
Metal insulator metal (MIM) capacitor fabrication with sidewall barrier removal aspect |
Sameer Ajmera, Stephan Grunow, Satyavolu S. Papa Rao, Phillip D. Matz |
2006-10-03 |
| 6977196 |
Micro-electromechanical switch fabricated by simultaneous formation of a resistor and bottom electrode |
Stuart M. Jacobsen, David J. Seymour |
2005-12-20 |
| 6764872 |
Microelectromechanical switch |
Tsen-Hwang Lin, Yu-Pei Chen |
2004-07-20 |
| 6698082 |
Micro-electromechanical switch fabricated by simultaneous formation of a resistor and bottom electrode |
Stuart M. Jacobsen, David J. Seymour |
2004-03-02 |
| 6699745 |
Capacitor and memory structure and method |
Aditi Banerjee, Rick L. Wise |
2004-03-02 |
| 6657832 |
Mechanically assisted restoring force support for micromachined membranes |
Bryon L. Williams, Laurinda Ng, Jose Melendez |
2003-12-02 |
| 6642593 |
Microelectromechanical switch |
Tsen-Hwang Lin, Yu-Pei Chen |
2003-11-04 |
| 6638818 |
Method of fabricating a dynamic random access memory with increased capacitance |
Promod Kumar |
2003-10-28 |
| 6525396 |
Selection of materials and dimensions for a micro-electromechanical switch for use in the RF regime |
Jose Melendez, Byron Lovell Williams, Yu-Pei Chen |
2003-02-25 |
| 6496352 |
Post-in-crown capacitor and method of manufacture |
William F. Richardson, Rick L. Wise |
2002-12-17 |
| 6376787 |
Microelectromechanical switch with fixed metal electrode/dielectric interface with a protective cap layer |
Wallace W. Martin, Yu-Pei Chen, Byron Lovell Williams, Jose Melendez |
2002-04-23 |
| 6197653 |
Capacitor and memory structure and method |
Rajesh Khamankar, Rick L. Wise, Katherine E. Violette, Aditi Banerjee |
2001-03-06 |
| 6184074 |
Method of fabrication a self-aligned polysilicon/diffusion barrier/oxygen stable sidewall bottom electrode structure for high-K DRAMS |
Scott R. Summerfelt |
2001-02-06 |
| 6180446 |
Method of fabricating an oxygen-stable layer/diffusion barrier/poly bottom electrode structure for high-K DRAMS using disposable-oxide processing |
Scott R. Summerfelt |
2001-01-30 |
| 6171898 |
Method of fabricating an oxygen-stable layer/diffusion barrier/poly bottom electrode structure for high-K-DRAMS using a disposable-oxide processing |
Scott R. Summerfelt |
2001-01-09 |
| 5998225 |
Method of fabricating an oxygen-stable layer/diffusion barrier/poly bottom electrode structure for high-K DRAMs using disposable-oxide processing |
Scott R. Summerfelt |
1999-12-07 |
| 5770499 |
Planarized capacitor array structure for high density memory applications |
Siang Ping Kwok, Peter S. McAnally |
1998-06-23 |
| 5726085 |
Method of fabricating a dynamic random access memory (DRAM) cell capacitor using hemispherical grain (HSG) polysilicon and selective polysilicon etchback |
Rick L. Wise, Jeffrey McKee |
1998-03-10 |