Issued Patents All Time
Showing 25 most recent of 56 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10788759 | Prediction based chucking and lithography control optimization | Oreste Donzella, Pradeep Vukkadala, Jaydeep Sinha | 2020-09-29 |
| 10325004 | Method of optimizing an optical parametric model for structural analysis using optical critical dimension (OCD) metrology | Thaddeus Gerard Dziura, Yung-Ho Alex Chuang, Xuefeng Liu, John J. Hench | 2019-06-18 |
| 10036964 | Prediction based chucking and lithography control optimization | Oreste Donzella, Pradeep Vukkadala, Jaydeep Sinha | 2018-07-31 |
| 9377414 | EUV high throughput inspection system for defect detection on patterned EUV masks, mask blanks, and wafers | Yung-Ho Alex Chuang, Richard W. Solarz, David Shafer, David L. Brown | 2016-06-28 |
| 9310296 | Optimizing an optical parametric model for structural analysis using optical critical dimension (OCD) metrology | Thaddeus Gerard Dziura, Yung-Ho Alex Chuang, Xuefeng Liu, John J. Hench | 2016-04-12 |
| 8962351 | Dopant metrology with information feedforward and feedback | Alex Salnik, Lena Nicolaides | 2015-02-24 |
| 8879073 | Optical metrology using targets with field enhancement elements | Jonathan M. Madsen, Andrei V. Shchegrov, Michael S. Bakeman, Thaddeus Gerard Dziura, Alexander Kuznetsov | 2014-11-04 |
| 8832611 | Process aware metrology | Xuefeng Liu, Yung-Ho Alex Chuang, John Fielden, Jingjing Zhang | 2014-09-09 |
| 8692986 | EUV high throughput inspection system for defect detection on patterned EUV masks, mask blanks, and wafers | Yung-Ho Alex Chuang, Richard W. Solarz, David Shafer, David L. Brown | 2014-04-08 |
| 8553217 | EUV high throughput inspection system for defect detection on patterned EUV masks, mask blanks, and wafers | Yung-Ho Alex Chuang, Richard W. Solarz, David Shafer, David L. Brown | 2013-10-08 |
| 8535957 | Dopant metrology with information feedforward and feedback | Alex Salnik, Lena Nicolaides | 2013-09-17 |
| 8468471 | Process aware metrology | Xuefeng Liu, Yung-Ho Alex Chuang, John Fielden, Jingjing Zhang | 2013-06-18 |
| 7858911 | Confocal wafer inspection system and method | Christopher R. Fairley, Tao-Yi Fu, Scott A. Young | 2010-12-28 |
| 7773296 | Ultra-broadband UV microscope imaging system with wide range zoom capability | David Shafer, Yung-Ho Alex Chuang | 2010-08-10 |
| 7733111 | Segmented optical and electrical testing for photovoltaic devices | Guoheng Zhao, Mehdi Vaez-Iravani, Ady Levy, George H. Zapalac, Jr., Samuel Ngai | 2010-06-08 |
| 7728968 | Excimer laser inspection system | Yung-Ho Alex Chuang, J. Joseph Armstrong, David L. Brown | 2010-06-01 |
| 7660686 | Ion implant metrology system with fault detection and identification | Lena Nicolaides, Alexei Salnik | 2010-02-09 |
| 7554655 | High throughput brightfield/darkfield water inspection system using advanced optical techniques | Christopher R. Fairley, Tao-Yi Fu, Gershon Perelman | 2009-06-30 |
| 7522275 | High throughput darkfield/brightfield wafer inspection system using advanced optical techniques | Christopher R. Fairley, Tao-Yi Fu, Gershon Perelman | 2009-04-21 |
| 7465913 | System and method for sensing using adjustable modulation transfer function (MTF) with voltage variations relative to depletion depth at a pixel | Yung-Ho Alex Chuang, J. Joseph Armstrong, David L. Brown | 2008-12-16 |
| 7457034 | High NA system for multiple mode imaging | Yung-Ho Alex Chuang, David Shafer, J. Joseph Armstrong | 2008-11-25 |
| 7423805 | Ultra-broadband UV microscope imaging system with wide range zoom capability | David Shafer, Yung-Ho Alex Chuang | 2008-09-09 |
| 7399950 | Confocal wafer inspection method and apparatus using fly lens arrangement | Christopher R. Fairley, Tao-Yi Fu, Scott A. Young | 2008-07-15 |
| 7379173 | High throughput brightfield/darkfield wafer inspection system using advanced optical techniques | Christopher R. Fairley, Tao-Yi Fu, Gershon Perelman | 2008-05-27 |
| 7259844 | High throughput darkfield/brightfield wafer inspection system using advanced optical techniques | Christopher R. Fairley, Tao-Yi Fu, Gershon Perelman | 2007-08-21 |