Issued Patents All Time
Showing 1–25 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12345658 | Large-particle monitoring with laser power control for defect inspection | Zhiwei Xu, Yury Yuditsky, Yifeng Cui, Mandar Paranjape | 2025-07-01 |
| 11733172 | Apparatus and method for rotating an optical objective | Jenn-Kuen Leong, Daniel Kavaldjiev, Chunhai Wang, Bret Whiteside, Zhiwei Xu | 2023-08-22 |
| 11374375 | Laser closed power loop with an acousto-optic modulator for power modulation | Mandar Paranjape, Steve Cui, Million Daniel, Nadine Asenbaum-Doerre, Jeff Chen | 2022-06-28 |
| 10488348 | Wafer inspection | Ivan Maleev, Daniel Kavaldjiev, Yury Yuditsky, Dirk Woll, Stephen Biellak +2 more | 2019-11-26 |
| 10324045 | Surface defect inspection with large particle monitoring and laser power control | Steve (Yifeng) Cui, Chunsheng Huang, Chunhai Wang, Christian Wolters, Bret Whiteside +2 more | 2019-06-18 |
| 10241217 | System and method for reducing radiation-induced false counts in an inspection system | Ximan Jiang, Christian Wolters, Stephen Biellak, Mous Tatarkhanov | 2019-03-26 |
| 10215712 | Method and apparatus for producing and measuring dynamically focused, steered, and shaped oblique laser illumination for spinning wafer inspection system | Christian Wolters, Bret Whiteside | 2019-02-26 |
| 9915622 | Wafer inspection | Ivan Maleev, Daniel Kavaldjiev, Yury Yuditsky, Dirk Woll, Stephen Biellak +2 more | 2018-03-13 |
| 9891177 | TDI sensor in a darkfield system | Jijen Vazhaeparambil, Guoheng Zhao, Daniel Kavaldjiev, Ivan Maleev, Christian Wolters +5 more | 2018-02-13 |
| 9841512 | System and method for reducing radiation-induced false counts in an inspection system | Ximan Jiang, Christian Wolters, Stephen Biellak, Mous Tatarkhanov | 2017-12-12 |
| 9810619 | Method and system for simultaneous tilt and height control of a substrate surface in an inspection system | Zhongping Cai, Jingyi Xiong, Tyler Trytko, Alexander Slobodov, Paul Doyle | 2017-11-07 |
| 9678350 | Laser with integrated multi line or scanning beam capability | Christian Wolters, Jijen Vazhaeparambil, Dirk Woll, Bret Whiteside, Stephen Biellak +1 more | 2017-06-13 |
| 9587936 | Scanning inspection system with angular correction | Yury Yuditsky, Alexander Slobodov | 2017-03-07 |
| 9279774 | Wafer inspection | Ivan Maleev, Daniel Kavaldjiev, Yury Yuditsky, Dirk Woll, Stephen Biellak +2 more | 2016-03-08 |
| 9091666 | Extended defect sizing range for wafer inspection | Zhongping Cai, Yury Yuditsky, Alexander Slobodov | 2015-07-28 |
| 9068952 | Method and apparatus for producing and measuring dynamically focussed, steered, and shaped oblique laser illumination for spinning wafer inspection system | Aleksey Petrenko, Christian Wolters, Zhongping Cai, Bret Whiteside | 2015-06-30 |
| 8934091 | Monitoring incident beam position in a wafer inspection system | Juergen Reich, Aleksey Petrenko, Richard Fong, Bret Whiteside, Jien Cao +2 more | 2015-01-13 |
| 8432944 | Extending the lifetime of a deep UV laser in a wafer inspection tool | George Kren, Bret Whiteside | 2013-04-30 |
| 8294887 | Fast laser power control with improved reliability for surface inspection | Stephen Biellak, Daniel Kavaldjiev, George Kren, Christian Wolters | 2012-10-23 |
| 8134698 | Dynamic range extension in surface inspection systems | Christian Wolters, Daniel Kavaldjiev, Bret Whiteside | 2012-03-13 |
| 7777875 | Systems, circuits and methods for extending the detection range of an inspection system by avoiding detector saturation | Christian Wolters, Alexander Slobodov | 2010-08-17 |
| 7773212 | Contemporaneous surface and edge inspection | Christian Wolters | 2010-08-10 |
| 7746462 | Inspection systems and methods for extending the detection range of an inspection system by forcing the photodetector into the non-linear range | Zhongping Cai, Alexander Slobodov, Christian Wolters | 2010-06-29 |
| 7671982 | Systems, circuits and methods for reducing thermal damage and extending the detection range of an inspection system | Christian Wolters | 2010-03-02 |
| 7436508 | Systems, circuits and methods for reducing thermal damage and extending the detection range of an inspection system | Christian Wolters | 2008-10-14 |