Issued Patents All Time
Showing 176–200 of 341 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7374793 | Methods and structures for promoting stable synthesis of carbon nanotubes | Toshiharu Furukawa, Mark C. Hakey, David Vaclav Hotak, Charles W. Koburger, III, Peter H. Mitchell +1 more | 2008-05-20 |
| 7368712 | Y-shaped carbon nanotubes as AFM probe for analyzing substrates with angled topography | Carol Boye, Toshiharu Furukawa, Mark C. Hakey, David V. Horak, Charles W. Koburger, III | 2008-05-06 |
| 7362412 | Method and apparatus for cleaning a semiconductor substrate in an immersion lithography system | Mark C. Hakey, Toshiharu Furukawa, David V. Horak | 2008-04-22 |
| 7358120 | Silicon-on-insulator (SOI) read only memory (ROM) array and method of making a SOI ROM | Toshiharu Furukawa, Mark C. Hakey, David V. Horak, Charles W. Koburger, III, Jack A. Mandelman | 2008-04-15 |
| 7358140 | Pattern density control using edge printing processes | Toshiharu Furukawa, Mark C. Hakey, David V. Horak, Charles W. Koburger, III | 2008-04-15 |
| 7351666 | Layout and process to contact sub-lithographic structures | Toshiharu Furukawa, Mark C. Hakey, David V. Horak, Charles W. Koburger, III, Chung H. Lam | 2008-04-01 |
| 7351348 | Evaporation control using coating | Daniel A. Corliss, Dario L. Goldfarb, Kurt R. Kimmel, Michael Lercel | 2008-04-01 |
| 7351648 | Methods for forming uniform lithographic features | Toshiharu Furukawa, Mark C. Hakey, David V. Horak, Charles W. Koburger, III, Chung H. Lam | 2008-04-01 |
| 7352030 | Semiconductor devices with buried isolation regions | Toshiharu Furukawa, Mark C. Hakey, David V. Horak, Charles W. Koburger, III | 2008-04-01 |
| 7352607 | Non-volatile switching and memory devices using vertical nanotubes | Toshiharu Furukawa, Mark C. Hakey, David V. Horak, Charles W. Koburger, III | 2008-04-01 |
| 7348634 | Shallow trench isolation formation | Toshiharu Furukawa, Mark C. Hakey, David V. Horak, Charles W. Koburger, III | 2008-03-25 |
| 7345370 | Wiring patterns formed by selective metal plating | Toshiharu Furukawa, Mark C. Hakey, David V. Horak, Charles W. Koburger, III | 2008-03-18 |
| 7329613 | Structure and method for forming semiconductor wiring levels using atomic layer deposition | Toshiharu Furukawa, David V. Horak, Charles W. Koburger, III | 2008-02-12 |
| 7329567 | Vertical field effect transistors incorporating semiconducting nanotubes grown in a spacer-defined passage | Toshiharu Furukawa, Mark C. Hakey, David V. Horak, Peter H. Mitchell, Larry Nesbit | 2008-02-12 |
| 7317226 | Patterned SOI by oxygen implantation and annealing | Keith E. Fogel, Mark C. Hakey, Devendra K. Sadana, Ghavam G. Shahidi | 2008-01-08 |
| 7288814 | Selective post-doping of gate structures by means of selective oxide growth | Anthony I. Chou, Toshiharu Furukawa | 2007-10-30 |
| 7282423 | Method of forming fet with T-shaped gate | Toshiharu Furukawa, Mark C. Hakey, David V. Horak, Edward J. Nowak | 2007-10-16 |
| 7273794 | Shallow trench isolation fill by liquid phase deposition of SiO2 | Mark C. Hakey, David V. Horak, Charles W. Koburger, III, Peter H. Mitchell, Larry Nesbit | 2007-09-25 |
| 7271079 | Method of doping a gate electrode of a field effect transistor | Toshiharu Furukawa, Mark C. Hakey, David V. Horak, Charles W. Koburger, III | 2007-09-18 |
| 7265013 | Sidewall image transfer (SIT) technologies | Toshiharu Furukawa, Mark C. Hakey, David V. Horak, Charles W. Koburger, III, Kirk D. Peterson | 2007-09-04 |
| 7264415 | Methods of forming alternating phase shift masks having improved phase-shift tolerance | Toshiharu Furukawa, Mark C. Hakey, David V. Horak, Charles W. Koburger, III, Peter H. Mitchell +1 more | 2007-09-04 |
| 7256415 | Memory device and method of manufacturing the device by simultaneously conditioning transition metal oxide layers in a plurality of memory cells | Toshijaru Furukawa, Mark C. Hakey, David V. Horak, Charles W. Koburger, III, Chung H. Lam +1 more | 2007-08-14 |
| 7256114 | Process for oxide cap formation in semiconductor manufacturing | Toshiharu Furukawa, Mark C. Hakey, David V. Horak, Charles W. Koburger, III, Larry Nesbit | 2007-08-14 |
| 7250347 | Double-gate FETs (Field Effect Transistors) | Toshiharu Furukawa, Mark C. Hakey, David V. Horak, Charles W. Koburger, III, Peter H. Mitchell +1 more | 2007-07-31 |
| 7239371 | Density-aware dynamic leveling in scanning exposure systems | Bernhard R. Liegl, Colin J. Brodsky, Scott Bukofsky | 2007-07-03 |