Issued Patents All Time
Showing 51–67 of 67 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10229986 | Vertical transport field-effect transistor including dual layer top spacer | Hemanth Jagannathan, Choonghyun Lee, Alexander Reznicek | 2019-03-12 |
| 10109455 | System and method for performing nano beam diffraction analysis | Marc A. Bergendahl, James J. Demarest, Christopher J. Penny, Roger QUON | 2018-10-23 |
| 10083908 | BEOL vertical fuse formed over air gap | Marc A. Bergendahl, James J. Demarest, Christopher J. Penny | 2018-09-25 |
| 9997454 | BEOL vertical fuse formed over air gap | Marc A. Bergendahl, James J. Demarest, Christopher J. Penny | 2018-06-12 |
| 9978560 | System and method for performing nano beam diffraction analysis | Marc A. Bergendahl, James J. Demarest, Christopher J. Penny, Roger QUON | 2018-05-22 |
| 9780027 | Hybrid airgap structure with oxide liner | Marc A. Bergendahl, James J. Demarest, Christopher J. Penny | 2017-10-03 |
| 9666528 | BEOL vertical fuse formed over air gap | Marc A. Bergendahl, James J. Demarest, Christopher J. Penny | 2017-05-30 |
| 9449871 | Hybrid airgap structure with oxide liner | Marc A. Bergendahl, James J. Demarest, Christopher J. Penny | 2016-09-20 |
| 9087876 | Titanium oxynitride hard mask for lithographic patterning | Son V. Nguyen, Tuan A. Vo | 2015-07-21 |
| 8986921 | Lithographic material stack including a metal-compound hard mask | Daniel C. Edelstein, Bryan G. Morris, Tuan A. Vo, Yunpeng Yin | 2015-03-24 |
| 8987133 | Titanium oxynitride hard mask for lithographic patterning | Son V. Nguyen, Tuan A. Vo | 2015-03-24 |
| 6703312 | Method of forming active devices of different gatelengths using lithographic printed gate images of same length | John W. Golz, Babar A. Khan, Joyce C. Liu, Teresa J. Wu | 2004-03-09 |
| 6489255 | Low temperature/low dopant oxide glass film | Son V. Nguyen, Donna R. Cote | 2002-12-03 |
| 6303275 | Method for resist filling and planarization of high aspect ratio features | Robert A. Coles, John W. Golz, Qinghuang Lin, Alan C. Thomas, Teresa J. Wu | 2001-10-16 |
| 6294449 | Self-aligned contact for closely spaced transistors | Teresa J. Wu, Bomy Chen, John W. Golz, Charles W. Koburger, III, Paul C. Parries +1 more | 2001-09-25 |
| 5753303 | Process for the elimination of tungsten oxidation with inert gas stabilization in chemical vapor deposition processes | Donna R. Cote, William J. Cote, Donna D. Miura | 1998-05-19 |
| 5712702 | Method and apparatus for determining chamber cleaning end point | Vincent J. McGahay, James G. Ryan, Michael J. Shapiro | 1998-01-27 |