Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8986921 | Lithographic material stack including a metal-compound hard mask | Daniel C. Edelstein, Tuan A. Vo, Christopher J. Waskiewicz, Yunpeng Yin | 2015-03-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8986921 | Lithographic material stack including a metal-compound hard mask | Daniel C. Edelstein, Tuan A. Vo, Christopher J. Waskiewicz, Yunpeng Yin | 2015-03-24 |