Issued Patents All Time
Showing 51–75 of 600 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8535494 | Rotary magnet sputtering apparatus | Tetsuya Goto, Takaaki Matsuoka | 2013-09-17 |
| 8513137 | Plasma processing apparatus and plasma processing method | Kazuhide Ino, Takahiro Arakawa | 2013-08-20 |
| 8502450 | Vacuum tube and vacuum tube manufacturing apparatus and method | Akihiro Morimoto | 2013-08-06 |
| 8497214 | Semiconductor device manufacturing method | Hirokazu Ueda, Toshihisa Nozawa, Takaaki Matsuoka, Akinobu Teramoto | 2013-07-30 |
| 8496792 | Rotary magnet sputtering apparatus | Tetsuya Goto, Takaaki Matsuoka | 2013-07-30 |
| 8492879 | Semiconductor substrate and semiconductor device | Akinobu Teramoto, Tomoyuki Suwa, Rihito Kuroda, Hideo Kudo, Yoshinori Hayamizu | 2013-07-23 |
| 8485534 | Metal gasket | Yasuyuki Shirai, Koji Sato, Masayuki Noguchi, Tsutomu Yoshida, Akira Muramatsu +2 more | 2013-07-16 |
| 8465719 | Silicon carbide substrate, semiconductor device, wiring substrate, and silicon carbide manufacturing method | Akinobu Teramoto, Sumio Sano, Fusao Fujita | 2013-06-18 |
| 8420974 | Long life welding electrode and its fixing structure, welding head, and welding method | Takahisa Nitta, Yasuyuki Shirai, Osamu Nakamura | 2013-04-16 |
| 8418714 | Flow rate range variable type flow rate control apparatus | Masahito Saito, Shoichi Hino, Tsuyoshi Shimazu, Kazuyuki Miura, Kouji Nishino +10 more | 2013-04-16 |
| 8399862 | Ion implanting apparatus and ion implanting method | Tetsuya Goto, Akinobu Teramoto, Takaaki Matsuoka | 2013-03-19 |
| 8389867 | Multilayered circuit substrate with semiconductor device incorporated therein | Ryo Enomoto, Akihiro Morimoto | 2013-03-05 |
| 8383194 | Film forming apparatus, film forming system, film forming method, and method of manufacturing electronic device or organic electroluminescence element | Takaaki Matsuoka, Shozo Nakayama, Hironori Ito | 2013-02-26 |
| 8372200 | Shower plate, method for manufacturing the shower plate, plasma processing apparatus using the shower plate, plasma processing method and electronic device manufacturing method | Masahiro Okesaku, Tetsuya Goto, Kiyotaka Ishibashi | 2013-02-12 |
| 8362567 | Semiconductor device | Akinobu Teramoto, Rihito Kuroda | 2013-01-29 |
| 8327796 | Plasma processing apparatus and plasma processing method | Masaki Hirayama | 2012-12-11 |
| 8314449 | MIS transistor and CMOS transistor | Takefumi Nishimuta, Hiroshi Miyagi, Shigetoshi Sugawa, Akinobu Teramoto | 2012-11-20 |
| 8308897 | Plasma processing apparatus and plasma processing method | Kazuhide Ino, Takahiro Arakawa | 2012-11-13 |
| 8299403 | Heat resisting vacuum insulating material and heating device | Yasuyuki Shirai, Sadao Kobayashi, Yoshihide Wakayama, Kazutaka Uekado | 2012-10-30 |
| 8294352 | Fluorescent lamp | Yasuyuki Shirai | 2012-10-23 |
| 8282807 | Metal member having a metal oxide film and method of manufacturing the same | Minoru Tahara, Yasuhiro Kawase | 2012-10-09 |
| 8268735 | Semiconductor device manufacturing method and method for reducing microroughness of semiconductor surface | Hitoshi Morinaga | 2012-09-18 |
| 8263174 | Light emitting device and method for manufacturing light emitting device | Yasushi Yagi, Shingo Watanabe, Toshihisa Nozawa, Chuichi Kawamura, Kimihiko Yoshino | 2012-09-11 |
| 8250966 | Method of manufacturing bellows | Tsutomu Yoshida, Yasuyuki Shirai, Masafumi Kitano | 2012-08-28 |
| 8241457 | Plasma processing system, plasma measurement system, plasma measurement method, and plasma control system | Mitsuo Kato, Masaki Sugiyama, Akihiko Hiroe, Masaki Hirayama | 2012-08-14 |