| 7732102 |
Cr-capped chromeless phase lithography |
Jonathan Cobb, Bernard J. Roman |
2010-06-08 |
| 7018747 |
Photomask having line end phase anchors |
Bernard J. Roman |
2006-03-28 |
| 6969568 |
Method for etching a quartz layer in a photoresistless semiconductor mask |
Shahid Rauf, Peter L. G. Ventzek |
2005-11-29 |
| 6902969 |
Process for forming dual metal gate structures |
Olubunmi O. Adetutu, Hsing-Huang Tseng |
2005-06-07 |
| 6818362 |
Photolithography reticle design |
Kevin Lucas, Robert Boone, Lloyd C. Litt |
2004-11-16 |
| 6797440 |
Method of forming a rim phase shifting mask and using the rim phase shifting mask to form a semiconductor device |
Cesar M. Garza, Bernard J. Roman, Pawitter Mangat, Kevin J. Nordquist, William J. Dauksher |
2004-09-28 |
| 6232134 |
Method and apparatus for monitoring wafer characteristics and/or semiconductor processing consistency using wafer charge distribution measurements |
David Gerald Farber, Phillip E. Crabtree |
2001-05-15 |
| 6171910 |
Method for forming a semiconductor device |
Christopher C. Hobbs, Bikas Maiti |
2001-01-09 |
| 6146948 |
Method for manufacturing a thin oxide for use in semiconductor integrated circuits |
Hsing-Huang Tseng, Phillip E. Crabtree, Yeong-Jyh T. Lii |
2000-11-14 |
