Issued Patents All Time
Showing 51–75 of 91 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6310934 | X-ray projection exposure apparatus and a device manufacturing method | Masami Tsukamoto | 2001-10-30 |
| 6167111 | Exposure apparatus for synchrotron radiation lithography | Yutaka Watanabe, Shunichi Uzawa, Yasuaki Fukuda, Nobutoshi Mizusawa | 2000-12-26 |
| 6087053 | Device manufacturing method with transfer magnification adjustment to correct thermal distortion of substrate | — | 2000-07-11 |
| 6084938 | X-ray projection exposure apparatus and a device manufacturing method | Masami Tsukamoto | 2000-07-04 |
| 6069931 | Mask structure and mask holding mechanism for exposure apparatus | Takeshi Miyachi | 2000-05-30 |
| 6011921 | Intermediate communication controller that sends transmission data in a predetermined order to a corresponding slave unit upon request from a master controller | Akihiro Takahashi, Takumi Iwai, Kenji Fukunaga, Shuichi Nakagawa | 2000-01-04 |
| 6005910 | Holding mechanism, and exposure apparatus using the mechanism | Yuji Chiba | 1999-12-21 |
| 5999589 | Substrate holding device and exposing apparatus using the same | Yuji Chiba, Nobutoshi Mizusawa, Kazunori Iwamoto, Yutaka Tanaka, Mitsuji Marumo +2 more | 1999-12-07 |
| 5994003 | Scanning exposure method and mask therefor | Takeshi Miyachi | 1999-11-30 |
| 5968214 | Air cleaning apparatus for vehicles | Yoshihiro Nagata, Shigetomo Noda, Toshio Harada, Tadakazu Ono, Tsutomu Kimura +2 more | 1999-10-19 |
| 5929032 | Method for treating Schwann and colon cells in vitro | Josette Françoise Carnahan, Hsieng Sen Lu, John Philip Mayer, Steven Kiyoshi Yoshinaga | 1999-07-27 |
| 5883932 | Substrate holding device and exposing apparatus using the same | Yuji Chiba, Nobutoshi Mizusawa, Kazunori Iwamoto, Yutaka Tanaka, Mitsuji Marumo +2 more | 1999-03-16 |
| 5854819 | Mask supporting device and correction method therefor, and exposure apparatus and device producing method utilizing the same | Takeshi Miyachi, Nobutoshi Mizusawa, Yuji Chiba, Kazuyuki Kasumi | 1998-12-29 |
| 5849705 | Method for the treatment of Schwann cells in vivo | Josette Françoise Carnahan, Hsieng Sen Lu, John Philip Mayer | 1998-12-15 |
| 5825463 | Mask and mask supporting mechanism | Nobutoshi Mizusawa, Yuji Chiba | 1998-10-20 |
| 5686415 | Method for the treatment of colon epithelial cells in vivo | Josette Françoise Carnahan, Hsieng Sen Lu, John Philip Mayer, Steven Kiyoshi Yoshinaga | 1997-11-11 |
| 5670342 | NDF peptides | Josette Françoise Carnahan, Hsieng Sen Lu, John Philip Mayer, Steven Kiyoshi Yoshinaga | 1997-09-23 |
| 5608773 | Mask holding device, and an exposure apparatus and a device manufacturing method using the device | Nobusige Korenaga, Kouichi Hara | 1997-03-04 |
| 5593800 | Mask manufacturing method and apparatus and device manufacturing method using a mask manufactured by the method or apparatus | Hidehiko Fujioka, Noriyuki Nose, Ryuichi Ebinuma, Hiroshi Maehara | 1997-01-14 |
| 5544213 | Mask holding method, mask and mask chuck, exposure apparatus using the mask and the mask chuck, and device production method using the exposure apparatus | Yuji Chiba | 1996-08-06 |
| 5485495 | X-ray mask, and exposure apparatus and device production using the mask | Takeshi Miyachi, Nobutoshi Mizusawa, Hiroshi Maehara | 1996-01-16 |
| 5478498 | Disordered fluorite-type photochemical hole burning crystal containing SM.sup.2+ as active ions | Nobuhiro Kodama, Kazuyuki Hirao, Yuka INOUE | 1995-12-26 |
| 5413167 | Wafer cooling device | Ryuichi Ebinuma | 1995-05-09 |
| 5374829 | Vacuum chuck | Eiji Sakamoto, Ryuichi Ebinuma, Mitsuji Marumo | 1994-12-20 |
| 5348457 | Vane-type compressor with at least one suction hole | Hiroyuki Suzuki, Mitsuya Ono | 1994-09-20 |