Issued Patents All Time
Showing 76–91 of 91 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5323440 | X-ray lithography apparatus including a dose detectable mask | Mitsuaki Amemiya, Shunichi Uzawa | 1994-06-21 |
| 5220171 | Wafer holding device in an exposure apparatus | Eiji Sakamoto, Ryuichi Ebinuma | 1993-06-15 |
| 5157700 | Exposure apparatus for controlling intensity of exposure radiation | Hiroshi Kurosawa, Mitsuaki Amemiya, Shigeru Terashima, Koji Uda, Isamu Shimoda +6 more | 1992-10-20 |
| 5155523 | Workpiece supporting mechanism | Shunichi Uzawa | 1992-10-13 |
| 5093579 | Exposure apparatus with a substrate holding mechanism | Mitsuaki Amemiya, Eiji Sakamoto | 1992-03-03 |
| 5063582 | Liquid cooled X-ray lithographic exposure apparatus | Tetsuzo Mori, Eiji Sakamoto, Koji Uda, Isamu Shimoda, Shunichi Uzawa +1 more | 1991-11-05 |
| 4971896 | Method for forming thin film pattern and method for fabricating thin film magnetic head using the same | Takashi Kawabe, Ataru Kobayashi, Moriaki Fuyama, Makoto Morijiri, Eiji Ashida +5 more | 1990-11-20 |
| 4969168 | Wafer supporting apparatus | Eiji Sakamoto, Isamu Shimoda, Shunichi Uzawa | 1990-11-06 |
| 4894737 | Magnetic head apparatus having projections extending from at least a front side thereof | Junji Hamana, Makoto Miyagi | 1990-01-16 |
| 4855123 | Method of oxidizing sulfide-containing liquor | Masayuki Suzuki, Kuniaki Kimura, Takeo Ono, Munekazu Nakamura, Yoshihiro Ohguchi | 1989-08-08 |
| 4839762 | Rotary head device | Kou Yoneda, Hideaki Miyakawa | 1989-06-13 |
| 4791719 | Method of manufacturing a thin-film magnetic head | Tetsuo Kobayashi, Yukihisa Tsukada, Shinji Narishige | 1988-12-20 |
| 4685014 | Production method of thin film magnetic head | Masanobu Hanazono, Hirosi Akiyama, Masaaki Hayashi, Harunobu Saitoo, Takumi Kurisu | 1987-08-04 |
| 4623439 | Thin film of Ni-Co-Fe ternary alloy and process for producing the same | Katsuya Mitsuoka, Shinji Narishige, Akira Kumagai, Masaaki Sano, Masanobu Hanazono | 1986-11-18 |
| 4592801 | Method of patterning thin film | Shinji Narishige, Tsuneo Yoshinari, Mistuo Sato, Katsuya Mitsuoka, Makoto Morijiri +2 more | 1986-06-03 |
| 4242177 | Method for oxidizing malodorous sulfur compounds in kraft cooking liquor | Masayuki Suzuki, Nobuo Onuma, Fumihiko Ishizuka, Akira Osawa, Akira Fukuzawa | 1980-12-30 |