Issued Patents All Time
Showing 26–50 of 91 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7158209 | Holding mechanism in exposure apparatus, and device manufacturing method | — | 2007-01-02 |
| 7145632 | Cooling apparatus | Eiji Sakamoto, Yoshinori Miwa, Yasuo Hasegawa, Yoshiki Kino | 2006-12-05 |
| 7106413 | Cooling mechanism | — | 2006-09-12 |
| 7102727 | Optical system for use in exposure apparatus and device manufacturing method using the same | — | 2006-09-05 |
| 7095480 | Cooling apparatus | Eiji Sakamoto, Yoshinori Miwa, Yasuo Hasegawa, Yoshiki Kino | 2006-08-22 |
| 7081949 | Illumination apparatus, projection exposure apparatus, and device fabrication method | — | 2006-07-25 |
| 7072438 | Reflection type mask | Keiko Chiba, Masami Tsukamoto, Yutaka Watanabe, Hiroshi Maehara | 2006-07-04 |
| 7068348 | Holding mechanism in exposure apparatus, and device manufacturing method | — | 2006-06-27 |
| 7054705 | Method of manufacturing semiconductor devices | Sumio Ogawa, Minoru Ueki | 2006-05-30 |
| 6990173 | Positioning apparatus, atmosphere substituting method, exposure apparatus, and device manufacturing method | Eigo Kawakami | 2006-01-24 |
| 6984362 | Processing apparatus, measuring apparatus, and device manufacturing method | Yutaka Tanaka, Shigeru Terashima, Takayuki Hasegawa, Shin Matsui | 2006-01-10 |
| 6935576 | Cleaning nozzle and cleaning apparatus | — | 2005-08-30 |
| 6843471 | Jetting apparatus for mixed flow of gas and liquid | — | 2005-01-18 |
| 6836531 | X-ray projection exposure apparatus and a device manufacturing method | Masami Tsukamoto | 2004-12-28 |
| 6804323 | Mask pattern magnification correction method, magnification correction apparatus, and mask structure | Akira Moriya, Takeshi Miyachi, Toshinobu Tokita | 2004-10-12 |
| 6750946 | Processing apparatus for processing sample in predetermined atmosphere | Yutaka Tanaka, Shigeru Terashima | 2004-06-15 |
| 6728332 | X-ray mask, and exposure method and apparatus using the same | Keiko Chiba, Masami Tsukamoto, Yutaka Watanabe, Hiroshi Maehara | 2004-04-27 |
| 6714277 | Exposure apparatus, gas replacement method, semiconductor device manufacturing method, semiconductor manufacturing factory and exposure apparatus maintenance method | Yutaka Tanaka, Kazuyuki Kasumi, Toru Hirabayashi | 2004-03-30 |
| 6668037 | X-ray projection exposure apparatus and a device manufacturing method | Masami Tsukamoto | 2003-12-23 |
| 6616898 | Processing apparatus with pressure control and gas recirculation system | Yutaka Tanaka, Shigeru Terashima, Takayuki Hasegawa, Shin Matsui | 2003-09-09 |
| 6584168 | X-ray projection exposure apparatus and a device manufacturing method | Masami Tsukamoto | 2003-06-24 |
| 6532182 | Semiconductor memory production system and semiconductor memory production method | Sumio Ogawa | 2003-03-11 |
| 6422827 | Injection apparatus for gas-liquid mixed flow | — | 2002-07-23 |
| 6349240 | Semiconductor device manufacturing system and method of manufacturing semiconductor devices | Sumio Ogawa, Minoru Ueki | 2002-02-19 |
| 6317479 | X-ray mask, and exposure method and apparatus using the same | Keiko Chiba, Masami Tsukamoto, Yutaka Watanabe, Hiroshi Maehara | 2001-11-13 |