Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5608773 | Mask holding device, and an exposure apparatus and a device manufacturing method using the device | Kouichi Hara, Shinichi Hara | 1997-03-04 |
| 5518550 | Stage apparatus for an exposure apparatus including a contant tension spring for canceling out a gravitational force of a movable stage by a tensile force | Masamichi Saito | 1996-05-21 |
| 5402680 | Velocity sensor and semiconductor exposing apparatus using such a sensor | — | 1995-04-04 |