| 8071963 |
Debris mitigation system and lithographic apparatus |
Maarten Marinus Johannes Wilhelmus Van Herpen, Derk Jan Wilfred Klunder, Kurt Gielissen |
2011-12-06 |
| 7952084 |
Radiation source and lithographic apparatus |
Maarten Marinus Johannes Wilhelmus Van Herpen, Martin Jacobus Johan Jak |
2011-05-31 |
| 7928412 |
Lithographic apparatus, and device manufacturing method |
Maarten Marinus Johannes Wilhelmus Van Herpen, Vadim Yevgenyevich Banine, Johannes Peterus Henricus De Kuster, Johannes Hubertus Josephina Moors, Lucas Henricus Johannes Stevens +5 more |
2011-04-19 |
| 7863591 |
Radiation system and lithographic apparatus comprising the same |
Maarten Marinus Johannes Wilhelmus Van Herpen, Vadim Yevgenyevich Banine, Derk Jan Wilfred Klunder, Johannes Christiaan Leonardus Franken, Olav Waldemar Vladimir Frijns +1 more |
2011-01-04 |
| 7839482 |
Assembly comprising a radiation source, a reflector and a contaminant barrier |
Maarten Marinus Johannes Wilhelmus Van Herpen |
2010-11-23 |
| 7771896 |
Patterning device, method of providing a patterning device, photolithographic apparatus and device manufacturing method |
Vadim Yevgenyevich Banine, Maarten Marinus Johannes Wilhelmus Van Herpen |
2010-08-10 |
| 7759663 |
Self-shading electrodes for debris suppression in an EUV source |
Maarten Marinus Johannes Wilhelmus Van Herpen |
2010-07-20 |
| 7737418 |
Debris mitigation system and lithographic apparatus |
Maarten Marinus Johannes Wilhelmus Van Herpen |
2010-06-15 |
| 7724349 |
Device arranged to measure a quantity relating to radiation and lithographic apparatus |
Maarten Marinus Johannes Wilhelmus Van Herpen, Niels Machiel Driessen, Vadim Yevgenyevich Banine, Johannes Christiaan Leonardus Franken, Olav Waldemar Vladimir Frijns +1 more |
2010-05-25 |
| 7696492 |
Radiation system and lithographic apparatus |
Arnoud Cornelis Wassink, Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Konstantin Nikolaevitch Koshelev, Theodorus Petrus Maria Cadee +4 more |
2010-04-13 |
| 7687788 |
Debris prevention system, radiation system, and lithographic apparatus |
Maarten Marinus Johannes Wilhelmus Van Herpen, Kurt Gielissen |
2010-03-30 |
| 7629593 |
Lithographic apparatus, radiation system, device manufacturing method, and radiation generating method |
Edwin Johan Buis, Vadim Yevgenyevich Banine, Tjarko Adriaan Rudolf Van Empel, Maarten Marinus Johannes Wilhelmus Van Herpen |
2009-12-08 |
| 7629594 |
Lithographic apparatus, and device manufacturing method |
Maarten Marinus Johannes Wilhelmus Van Herpen, Vadim Yevgenyevich Banine, Johannes Peterus Henricus De Kuster, Johannes Hubertus Josephina Moors, Lucas Henricus Johannes Stevens +5 more |
2009-12-08 |
| 7615767 |
Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby |
Maarten Marinus Johannes Wilhelmus Van Herpen |
2009-11-10 |
| 7541603 |
Radiation system and lithographic apparatus comprising the same |
Maarten Marinus Johannes Wilhelmus Van Herpen, Vadim Yevgenyevich Banine, Derk Jan Wilfred Klunder, Johannes Christiaan Leonardus Franken, Olav Waldemar Vladimir Frijns +1 more |
2009-06-02 |
