Issued Patents All Time
Showing 26–50 of 65 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10582589 | Lighting system with integrated sensor | Willem Sillevis-Smitt | 2020-03-03 |
| 10490710 | Hybrid chip-on-board LED module with patterned encapsulation | Rene Helbing, Guan Huang | 2019-11-26 |
| 10165640 | Printed circuit board for integrated LED driver | Zhihua Song, Ron Bonne, Yifeng Qiu | 2018-12-25 |
| 10113700 | Lighting system having reduced melanopic spectral content | Oleg Borisovich Shchekin, Hans-Helmut Bechtel | 2018-10-30 |
| 9905737 | Hybrid chip-on-board LED module with patterned encapsulation | Rene Helbing, Guan Huang | 2018-02-27 |
| 9890911 | LED module with uniform phosphor illumination | Hendrik Johannes Boudewijn Jagt, Olexandr Valentynovych Vdovin | 2018-02-13 |
| 9726989 | Spectral purity filter | Vadim Yevgenyevich Banine, Erik Roelof Loopstra, Andrei Mikhailovich Yakunin, Martin Jacobus Johan Jak | 2017-08-08 |
| 9465306 | Source module of an EUV lithographic apparatus, lithographic apparatus, and method for manufacturing a device | Maarten Marinus Johannes Wilhelmus Van Herpen, Andrei Mikhailovich Yakunin | 2016-10-11 |
| 9195144 | Spectral purity filter, radiation source, lithographic apparatus, and device manufacturing method | Martin Jacobus Johan Jak, Vadim Yevgenyevich Banine, Maarten Marinus Johannes Wilhelmus Van Herpen, Andrei Mikhailovich Yakunin | 2015-11-24 |
| 9195152 | Spectral purity filter, lithographic apparatus, and method for manufacturing a spectral purity filter | Andrei Mikhailovich Yakunin, Martin Jacobus Johan Jak, Denny Mathew, Hendrik Jan Kettelarij, Fredericus Christiaan Van Den Heuvel +1 more | 2015-11-24 |
| 9041912 | Spectral purity filters for use in a lithographic apparatus | Vadim Yevgenyevich Banine, Maarten Marinus Johannes Wilhelmus Van Herpen, Andrey Mikhailovich Yakunin, Martin Jacobus Johan Jak | 2015-05-26 |
| 8836917 | Zone plate | Maarten Marinus Johannes Wilhelmus Van Herpen | 2014-09-16 |
| 8817237 | Spectral purity filter, lithographic apparatus, and method for manufacturing a spectral purity filter | Martin Jacobus Johan Jak, Ronald Dekker | 2014-08-26 |
| 8742381 | Radiation source with cleaning apparatus | Vadim Yevgenyevich Banine, Maarten Marinus Johannes Wilhelmus Van Herpen, Martin Jacobus Johan Jak | 2014-06-03 |
| 8665420 | Spectral purity filter and lithographic apparatus | Maarten Marinus Johannes Wilhelmus Van Herpen | 2014-03-04 |
| 8593617 | Lithographic apparatus, plasma source, and reflecting method | Maarten Marinus Johannes Wilhelmus Van Herpen | 2013-11-26 |
| 8416391 | Radiation source, lithographic apparatus and device manufacturing method | Vadim Yevgenyevich Banine, Maarten Marinus Johannes Wilhelmus Van Herpen | 2013-04-09 |
| 8405051 | Method for removing a deposition on an uncapped multilayer mirror of a lithographic apparatus, lithographic apparatus and device manufacturing method | Vadim Yevgenyevich Banine, Maarten Marinus Johannes Wilhelmus Van Herpen, Martin Jacobus Johan Jak | 2013-03-26 |
| 8390788 | Spectral purity filters for use in a lithographic apparatus | Vadim Yevgenyevich Banine, Maarten Marinus Johannes Wilhelmus Van Herpen, Andrey Mikhailovich Yakunin, Martin Jacobus Johan Jak | 2013-03-05 |
| 8345223 | Optical element, lithographic apparatus including such an optical element, device manufacturing method, and device manufactured thereby | Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors, Maarten Marinus Johannes Wilhelmus Van Herpen, Andrei Mikhailovich Yakunin | 2013-01-01 |
| 8289499 | Optical element, lithographic apparatus including such an optical element, device manufacturing method, and device manufactured thereby | Maarten Marinus Johannes Wilhelmus Van Herpen | 2012-10-16 |
| 8263950 | Radiation source | Maarten Marinus Johannes Wilhelmus Van Herpen, Kurt Gielissen, Martin Jacobus Johan Jak | 2012-09-11 |
| 8242471 | Radiation source and lithographic apparatus including a contamination trap | Vadim Yevgenyevich Banine, Tjarko Adriaan Rudolf Van Empel, Erik Roelof Loopstra, Maarten Marinus Johannes Wilhelmus Van Herpen | 2012-08-14 |
| 8227771 | Debris prevention system and lithographic apparatus | Maarten Marinus Johannes Wilhelmus Van Herpen | 2012-07-24 |
| 8120752 | Lithographic apparatus | Maarten Marinus Johannes Wilhelmus Van Herpen | 2012-02-21 |