Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10481503 | Method and apparatus for measuring a parameter of a lithographic process, substrate and patterning devices for use in the method | Maurits Van Der Schaar, Youping Zhang, Hendrik Jan Hidde Smilde, Anagnostis Tsiatmas, Adriaan Johan Van Leest +3 more | 2019-11-19 |
| 10453758 | Method and apparatus to determine a patterning process parameter using an asymmetric optical characteristic distribution portion | Adriaan Johan Van Leest, Anagnostis Tsiatmas, Paul Christiaan Hinnen, Elliott Gerard McNamara, Alok Verma +1 more | 2019-10-22 |
| 10429746 | Estimation of data in metrology | Alexandru ONOSE, Seyed Iman Mossavat | 2019-10-01 |
| 9927717 | Inspection method and apparatus, and lithographic apparatus | Kyu Kab Rhe, David Deckers, Hubertus Johannes Gertrudus Simons | 2018-03-27 |
| 9360769 | Method of determining focus corrections, lithographic processing cell and device manufacturing method | Arend Johannes Kisteman, Wim Tjibbo Tel, Antoine Gaston Marie Kiers | 2016-06-07 |
| 9360770 | Method of determining focus corrections, lithographic processing cell and device manufacturing method | Arend Johannes Kisteman, Wim Tjibbo Tel, Antoine Gaston Marie Kiers | 2016-06-07 |
| 9177219 | Method of calibrating a lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product | Wim Tjibbo Tel, Wouter Onno Pril, Alexander Padiy | 2015-11-03 |