Issued Patents All Time
Showing 26–50 of 56 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7851770 | Device for optical excitation using a multiple wavelength arrangement | Maarten Marinus Johannes Wilhelmus Van Herpen, Marcello Leonardo Mario Balistreri | 2010-12-14 |
| 7812330 | Radical cleaning arrangement for a lithographic apparatus | Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Johannes Hubertus Josephina Moors, Bastiaan Theodoor Wolschrijn, Maarten Marinus Johannes Wilhelmus Van Herpen | 2010-10-12 |
| 7750326 | Lithographic apparatus and cleaning method therefor | Maarten Marinus Johannes Wilhelmus Van Herpen, Vadim Yevgenyevich Banine | 2010-07-06 |
| 7736820 | Anti-reflection coating for an EUV mask | Maarten Marinus Johannes Wilhelmus Van Herpen, Vadim Yevgenyevich Banine, Koen Van Ingen Schenau | 2010-06-15 |
| 7706057 | Spectral purity filter for a multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method | Maarten Marinus Johannes Wilhelmus Van Herpen, Levinus Pieter Bakker, Vadim Yevgenyevich Banine | 2010-04-27 |
| 7696493 | Radiation system and lithographic apparatus | Maarten Marinus Johannes Wilhelmus Van Herpen, Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Konstantin Nikolaevitch Koshelev | 2010-04-13 |
| 7696492 | Radiation system and lithographic apparatus | Arnoud Cornelis Wassink, Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Konstantin Nikolaevitch Koshelev, Theodorus Petrus Maria Cadee +4 more | 2010-04-13 |
| 7692169 | Method for filtering particles out of a beam of radiation and filter for a lithographic apparatus | Levinus Pieter Bakker, Maarten Marinus Johannes Wilhelmus Van Herpen | 2010-04-06 |
| 7615760 | Luminescence sensor comprising at least two wire grids | Maarten Marinus Johannes Wilhelmus Van Herpen, Henk Van Houten | 2009-11-10 |
| 7598503 | Lithographic apparatus and cleaning method therefor | Maarten Marinus Johannes Wilhelmus Van Herpen, Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors | 2009-10-06 |
| 7560708 | Luminescence sensor using multi-layer substrate structure | Maarten Marinus Johannes Wilhelmus Van Herpen | 2009-07-14 |
| 7561247 | Method for the removal of deposition on an optical element, method for the protection of an optical element, device manufacturing method, apparatus including an optical element, and lithographic apparatus | Maarten Marinus Johannes Wilhelmus Van Herpen, Carolus Ida Maria Antonius Spee, Antonius Maria Bernardus De Mol | 2009-07-14 |
| 7541603 | Radiation system and lithographic apparatus comprising the same | Maarten Marinus Johannes Wilhelmus Van Herpen, Vadim Yevgenyevich Banine, Wouter Anthon Soer, Johannes Christiaan Leonardus Franken, Olav Waldemar Vladimir Frijns +1 more | 2009-06-02 |
| 7518128 | Lithographic apparatus comprising a cleaning arrangement, cleaning arrangement and method for cleaning a surface to be cleaned | Maarten Marinus Johannes Wilhelmus Van Herpen | 2009-04-14 |
| 7504643 | Method for cleaning a lithographic apparatus module, a cleaning arrangement and a lithographic apparatus comprising the cleaning arrangement | Johannes Maria Freriks, Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Maarten Marinus Johannes Wilhelmus Van Herpen | 2009-03-17 |
| 7468521 | Lithographic apparatus and device manufacturing method | Levinus Pieter Bakker, Vadim Yevgenyevich Banine, Frank Jeroen Pieter Schuurmans, Dominik Marcel Vaudrevange, Maarten Marinus Johannes Wilhelmus Van Herpen | 2008-12-23 |
| 7465943 | Controlling the flow through the collector during cleaning | Vadim Yevgenyevich Banine, Sonia Margart Skelly, Maarten Marinus Johannes Wilhelmus Van Herpen | 2008-12-16 |
| 7462850 | Radical cleaning arrangement for a lithographic apparatus | Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Johannes Hubertus Josephina Moors, Bastiaan Theodoor Wolschrijn, Maarten Marinus Johannes Wilhelmus Van Herpen | 2008-12-09 |
| 7463413 | Spectral purity filter for a multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method | Maarten Marinus Johannes Wilhelmus Van Herpen, Levinus Pieter Bakker, Vadim Yevgenyevich Banine | 2008-12-09 |
| 7453645 | Spectral purity filter, lithographic apparatus including such a spectral purity filter, device manufacturing method, and device manufactured thereby | Maarten Marinus Johannes Wilhelmus Van Herpen | 2008-11-18 |
| 7414700 | Method for the removal of deposition on an optical element, method for the protection of an optical element, device manufacturing method, apparatus including an optical element, and lithographic apparatus | Maarten Marinus Johannes Wilhelmus Van Herpen, Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors, Carolus Ida Maria Antonius Spee | 2008-08-19 |
| 7397538 | Radiation system and lithographic apparatus | Wilhelmus Josephus Box, Maarten Marinus Johannes Wilhelmus Van Herpen, Niels Machiel Driessen, Hendrikus Gijsbertus Schimmel | 2008-07-08 |
| 7372049 | Lithographic apparatus including a cleaning device and method for cleaning an optical element | Maarten Marinus Johannes Wilhelmus Van Herpen | 2008-05-13 |
| 7355672 | Method for the removal of deposition on an optical element, method for the protection of an optical element, device manufacturing method, apparatus including an optical element, and lithographic apparatus | Maarten Marinus Johannes Wilhelmus Van Herpen, Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors, Carolus Ida Maria Antonius Spee | 2008-04-08 |
| 7336416 | Spectral purity filter for multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method | Maarten Marinus Johannes Wilhelmus Van Herpen, Levinus Pieter Bakker, Vadim Yevgenyevich Banine | 2008-02-26 |