Issued Patents All Time
Showing 51–56 of 56 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7332731 | Radiation system and lithographic apparatus | Maarten Marinus Johannes Wilhelmus Van Herpen | 2008-02-19 |
| 7262423 | Radiation system and lithographic apparatus | Maarten Marinus Johannes Wilhelmus Van Herpen, Johannes Hubertus Josephina Moors | 2007-08-28 |
| 7233010 | Radiation system and lithographic apparatus | Maarten Marinus Johannes Wilhelmus Van Herpen, Vadim Yevgenyevich Banine, Arnoud Cornelis Wassink | 2007-06-19 |
| 7196343 | Optical element, lithographic apparatus including such an optical element, device manufacturing method, and device manufactured thereby | Maarten Marinus Johannes Wilhelmus Van Herpen, Levinus Pieter Bakker | 2007-03-27 |
| 7145132 | Lithographic apparatus, illumination system and debris trapping system | Levinus Pieter Bakker, Maarten Marinus Johannes Wilhelmus Van Herpen | 2006-12-05 |
| 7106832 | Apparatus including a radiation source, a filter system for filtering particles out of radiation emitted by the source, and a processing system for processing the radiation, a lithographic apparatus including such an apparatus, and a method of filtering particles out of radiation emitting and propagating from a radiation source | Levinus Pieter Bakker, Vadim Yevgenyevich Banine, Maarten Marinus Johannes Wilhelmus Van Herpen | 2006-09-12 |