Issued Patents All Time
Showing 51–70 of 70 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9576792 | Deposition of SiN | Shang Chen, Viljami Pore, Ryoko Yamada | 2017-02-21 |
| 9564309 | Si precursors for deposition of SiN at low temperatures | Shang Chen, Viljami Pore, Atsuki Fukazawa, Hideaki Fukuda, Suvi Haukka | 2017-02-07 |
| 9564314 | Methods for forming doped silicon oxide thin films | Noboru Takamure, Atsuki Fukazawa, Hideaki Fukuda, Suvi Haukka, Ryu Nakano +1 more | 2017-02-07 |
| 9535029 | Low-cost electrode chip variants and methods for multi analyte analysis and referencing based on cathodic electroluminescence | Sakari Kulmala, Aija Kulmala, Kari Loikas, Matti Pusa | 2017-01-03 |
| 9502289 | Selective formation of metallic films on metallic surfaces | Suvi Haukka, Marko Tuominen | 2016-11-22 |
| 9490145 | Removal of surface passivation | Jaakko Anttila | 2016-11-08 |
| 9377433 | Accurate integrated low-cost electrode chips for point-of-need analysis and a method of utilization in hot electron-induced electrochemiluminescent systems | Sakari Kulmala, Samuli Franssila, Tiina Ylinen-Hinkka | 2016-06-28 |
| 9368352 | Methods for forming doped silicon oxide thin films | Noboru Takamure, Atsuki Fukazawa, Hideaki Fukuda, Suvi Haukka, Ryu Nakano +1 more | 2016-06-14 |
| 9257303 | Selective formation of metallic films on metallic surfaces | Suvi Haukka, Marko Tuominen | 2016-02-09 |
| 9153441 | Methods for forming doped silicon oxide thin films | Noboru Takamure, Atsuki Fukazawa, Hideaki Fukuda, Suvi Haukka, Ryu Nakano +1 more | 2015-10-06 |
| 9112003 | Selective formation of metallic films on metallic surfaces | Suvi Haukka, Marko Tuominen | 2015-08-18 |
| 8956971 | Selective formation of metallic films on metallic surfaces | Suvi Haukka, Marko Tuominen | 2015-02-17 |
| 8912101 | Method for forming Si-containing film using two precursors by ALD | Naoto Tsuji, Atsuki Fukazawa, Noboru Takamure, Suvi Haukka, Hyung Sang Park | 2014-12-16 |
| 8846502 | Methods for depositing thin films comprising gallium nitride by atomic layer deposition | Suvi Haukka, Viljami Pore | 2014-09-30 |
| 8756979 | Multifunctional apparatus comprising a superliquidphobic surface | Chris Bower, Jani Kivioja, Richard White | 2014-06-24 |
| 8679958 | Methods for forming doped silicon oxide thin films | Noboru Takamure, Atsuki Fukazawa, Hideaki Fukuda, Suvi Haukka, Ryu Nakano +1 more | 2014-03-25 |
| 8670124 | Apparatus and method for converting sensor input signals into digital output signals | Hongwei Li | 2014-03-11 |
| 8409866 | Apparatus and associated methods | Jani Kivioja | 2013-04-02 |
| 7498272 | Method of depositing rare earth oxide thin films | Jaakko Niinisto, Matti Putkonen, Mikko Ritala, Petri Raisanen, Markku Leskelä | 2009-03-03 |
| 6858546 | Method of depositing rare earth oxide thin films | Jaakko Niinisto, Matti Putkonen, Mikko Ritala, Petri Raisanen, Markku Leskelä | 2005-02-22 |