Issued Patents All Time
Showing 26–50 of 70 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10741386 | Deposition of SiN | Shang Chen, Viljami Pore, Ryoko Yamada | 2020-08-11 |
| 10741411 | Removal of surface passivation | Jaakko Anttila | 2020-08-11 |
| 10707082 | Methods for depositing thin films comprising indium nitride by atomic layer deposition | Suvi Haukka, Viljami Pore | 2020-07-07 |
| 10612137 | Organic reactants for atomic layer deposition | Eva Tois, Hidemi Suemori, Suvi Haukka | 2020-04-07 |
| 10573511 | Methods for forming silicon nitride thin films | Suvi Haukka, Jaakko Anttila | 2020-02-25 |
| 10510530 | Methods for forming doped silicon oxide thin films | Noboru Takamure, Atsuki Fukazawa, Hideaki Fukuda, Suvi Haukka, Ryu Nakano +1 more | 2019-12-17 |
| 10480064 | Reaction chamber passivation and selective deposition of metallic films | Delphine Longrie, Han Wang, Qi Xie, Jan Willem Maes, Shang Chen +4 more | 2019-11-19 |
| 10456808 | Selective deposition of metals, metal oxides, and dielectrics | Suvi Haukka, Raija H. Matero, Eva Tois, Marko Tuominen, Hannu Huotari +2 more | 2019-10-29 |
| 10443123 | Dual selective deposition | Suvi Haukka, Raija H. Matero, Eva Tois, Marko Tuominen, Hannu Huotari +1 more | 2019-10-15 |
| 10424477 | Si precursors for deposition of SiN at low temperatures | Shang Chen, Viljami Pore | 2019-09-24 |
| 10395917 | Si precursors for deposition of SiN at low temperatures | Shang Chen, Viljami Pore, Atsuki Fukazawa, Hideaki Fukuda, Suvi Haukka | 2019-08-27 |
| 10262854 | Deposition of SiN | Shang Chen, Viljami Pore, Ryoko Yamada | 2019-04-16 |
| 10204790 | Methods for thin film deposition | Jun Kawahara, Suvi Haukka, Eva Tois, Raija H. Matero, Hidemi Suemori +2 more | 2019-02-12 |
| 10157786 | Selective formation of metallic films on metallic surfaces | Suvi Haukka, Marko Tuominen | 2018-12-18 |
| 10147600 | Methods for forming doped silicon oxide thin films | Noboru Takamure, Atsuki Fukazawa, Hideaki Fukuda, Suvi Haukka, Ryu Nakano +1 more | 2018-12-04 |
| 10115603 | Removal of surface passivation | Jaakko Anttila | 2018-10-30 |
| 10049924 | Selective formation of metallic films on metallic surfaces | Suvi Haukka, Marko Tuominen | 2018-08-14 |
| 10047435 | Dual selective deposition | Suvi Haukka, Raija H. Matero, Eva Tois, Marko Tuominen, Hannu Huotari +1 more | 2018-08-14 |
| 10041166 | Reaction chamber passivation and selective deposition of metallic films | Delphine Longrie, Han Wang, Qi Xie, Jan Willem Maes, Shang Chen +4 more | 2018-08-07 |
| 9905416 | Si precursors for deposition of SiN at low temperatures | Shang Chen, Viljami Pore, Atsuki Fukazawa, Hideaki Fukuda, Suvi Haukka | 2018-02-27 |
| 9895715 | Selective deposition of metals, metal oxides, and dielectrics | Suvi Haukka, Raija H. Matero, Eva Tois, Marko Tuominen, Hannu Huotari +2 more | 2018-02-20 |
| 9875893 | Methods for forming doped silicon oxide thin films | Noboru Takamure, Atsuki Fukazawa, Hideaki Fukuda, Suvi Haukka, Ryu Nakano +1 more | 2018-01-23 |
| 9824881 | Si precursors for deposition of SiN at low temperatures | Shang Chen, Viljami Pore | 2017-11-21 |
| 9803277 | Reaction chamber passivation and selective deposition of metallic films | Delphine Longrie, Han Wang, Qi Xie, Jan Willem Maes, Shang Chen +4 more | 2017-10-31 |
| 9679808 | Selective formation of metallic films on metallic surfaces | Suvi Haukka, Marko Tuominen | 2017-06-13 |